Towards novel tools for in operando TEM: Plasma modification live

开发用于操作 TEM 的新颖工具：实时等离子体改性

• 批准号: 413664940
• 负责人: Professor Dr. Holger Kersten
• 金额: --
• 依托单位: Institut für Experimentelle und Angewandte Physik
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2019
• 资助国家: 德国
• 起止时间: 2018-12-31 至 2021-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/413664940?language=en
• 关键词: Towards; novel; tools; operando; TEM

The proposed project focuses on the development of advanced methods to elucidate the structural and chemical modification of solids during plasma interaction (e.g. at the plasma interface) with in operando electron microscopy techniques. The ex situ characterization of nanostructures and networks modified by an external low-pressure plasma serves as basic experiment in order to establish highly challenging in situ and in operando examinations by an atmospheric micro discharge inside the transmission electron microscope (TEM). For this purpose a miniaturized plasma cell for implementation inside the TEM will be designed. The target materials for surface modification and nanostructure growth at the plasma are ranging from thin ceramic films (Ni3N, Fe3N) up to novel porous network structures like (hybridized) ZnO and SnO2 networks, aerographite, aero-BN and -GaN. The preparation of the samples has to be adapted to the specific needs of the experiments, e.g. including in situ crystallization inside TEM. The microstructural observations include state of the art transmission techniques as well as surface sensitive electron microscopy enabling to monitor the initially occurring modifications at the plasma interface upon plasma treatment. The miniaturized plasma cell applied for the in situ and in operando experiments will be designed to understand the influence of plasma parameters (particle and energy fluxes) on the processes at the plasma interface.This project combines synergistically the knowledge of the principle investigators working on plasma processing and micro plasmas, as well as transmission electron microscopy, especially in situ techniques and chemical analyses, respectively. The ultimate goal of the project is to investigate the structural evolution at the plasma interface in operando, like the formation of characteristic defects, surface reconstruction and nanostructure growth. Severe plasma modification will also be monitored via state of the art X-ray diffraction, thus providing complementary information on larger length scale.

拟议项目的重点是发展先进的方法，以阐明在等离子体相互作用（例如在等离子体界面）与在操作电子显微镜技术的固体的结构和化学改性。通过外部低压等离子体改性的纳米结构和网络的非原位表征作为基本实验，以建立极具挑战性的原位和在操作检查通过大气微放电内的透射电子显微镜（TEM）。为此，将设计一种用于TEM内部实施的小型化等离子体单元。等离子体表面改性和纳米结构生长的目标材料范围从薄陶瓷膜（Ni3N，Fe3N）到新型多孔网络结构，如（杂化）ZnO和SnO2网络，航空石墨，航空BN和GaN。样品的制备必须适应实验的特定需求，例如包括TEM内的原位结晶。微观结构的观察包括最先进的传输技术，以及表面敏感的电子显微镜，能够监测等离子体处理后，在等离子体界面处最初发生的修改。微型等离子体池应用于原位和在operando实验将被设计为了解等离子体参数（粒子和能量通量）的影响，在等离子体界面的过程中，该项目结合协同等离子体加工和微等离子体，以及透射电子显微镜，特别是在原位技术和化学分析，分别工作的主要研究人员的知识。该项目的最终目标是研究操作中等离子体界面的结构演化，如特征缺陷的形成，表面重建和纳米结构生长。还将通过最先进的X射线衍射监测严重的等离子体改性，从而提供更大长度尺度的补充信息。