Optimized Scheduling for Semiconductor Manufacturing Facilities with Vehicle-Free Transport Systems

利用无车辆运输系统优化半导体制造设施的调度

• 批准号: 415848118
• 负责人: Professor Dr.-Ing. Klaus Kabitzsch
• 金额: --
• 依托单位: Professur für Technische Informationssysteme
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2019
• 资助国家: 德国
• 起止时间: 2018-12-31 至 2020-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/415848118?language=en
• 关键词: Optimized; Scheduling; Semiconductor; Manufacturing; Facilities

In the semiconductor manufacturing industry, theoretically well-grounded but practicable methods for simultaneous optimization of manufacturing and transport operations are needed. The existing theoretical fundamentals of modeling, analysis and optimization are insufficient for the highly complex and fully automated transport procedures as they prevail in modern semiconductor fabricating facilities. Specifically, there exists very little literature about combined scheduling of manufacturing and intra-plant transports. Furthermore, there are neither academic nor commercial software tools available for this combined scheduling task. Particularly for factories with the emerging, cost-efficient, vehicle-free transport systems, there is no comprehensive theoretical methodology for an integrated optimization realistic manufacturing procedures and transport operations.Consequently, the general goal is stated as follows:Practicable optimization methods for the combined scheduling of manufacturing and transport operations shall be designed, implemented and tested. The methods shall be applicable in real semiconductor fabricating facilities. Hence, the pursued result are optimized intra-plant transport procedures in highly automated semiconductor factories. The derived process and optimization models shall be generated automatically. The individual algorithms shall be implemented as prototypes in a demonstrative way. Additionally, the algorithms shall be tested with practical, industrial examples.In this project mathematical formulations of relevant optimization problems shall be developed on the one hand. On the other hand, novel algorithms for solving these problems shall be researched. Both, problem formulations as well as solving methods, are not only useful in many semiconductor factories. Moreover, the findings will extend the method pool of the research area of scheduling. Hence, the findings will be available for other industries as well. Therefore, the suggested project is fundamental research.

在半导体制造行业中，需要理论基础良好但实际可行的方法来同时优化制造和运输操作。现有的建模、分析和优化的理论基础不足以满足现代半导体制造设施中普遍存在的高度复杂和完全自动化的运输过程。具体而言，关于制造和工厂内运输的联合调度的文献很少。此外，既没有学术软件工具也没有商业软件工具可用于这种组合调度任务。特别是对于新兴的、具有成本效益的、无车辆运输系统的工厂，没有综合的理论方法来优化现实的制造程序和运输操作。因此，总体目标如下：设计、实施和测试制造和运输作业联合调度的可行优化方法。该方法应适用于实际的半导体制造设备。因此，所追求的结果是在高度自动化的半导体工厂中优化厂内运输程序。所导出的过程和优化模型应自动生成。每个算法应作为原型以演示的方式实现。此外，算法还需要用实际的工业实例进行测试。在本项目中，一方面需要开发相关优化问题的数学公式。另一方面，需要研究解决这些问题的新算法。问题的表述和解决方法都不仅在许多半导体工厂有用。此外，研究结果将扩展调度研究领域的方法库。因此，研究结果也将适用于其他行业。因此，建议项目为基础研究。