Time-resolved microscopy and model-based analysis of Transparent Conductive Oxides thin-film ablation by spatial and temporal shaped ultrashort pulsed laser radiation

空间和时间成形超短脉冲激光辐射透明导电氧化物薄膜烧蚀的时间分辨显微镜和基于模型的分析

• 批准号: 423531130
• 负责人: Professor Dr.-Ing. Arnold Gillner
• 金额: --
• 依托单位: Fraunhofer-Institut für Lasertechnik (ILT)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2019
• 资助国家: 德国
• 起止时间: 2018-12-31 至 2022-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/423531130?language=en
• 关键词: Time; resolved; microscopy; model; based

In this project, a basic understanding of the so-called partial and indirectly induced laser ablation of transparent, conductive layers using ultra-short pulsed laser radiation applied to ITO (Indium Tin Oxide) is to be developed. The result is a description in the form of a Metamodel, which is obtained from simulations and experimental data. By selective use of this laser-induced ablation, electrically conductive structures are separated or structured producing functional surfaces for components, such as front electrodes of a light-emitting diode. Since the end components often consist of several thin films with layer thicknesses in the range of a few tens to 100 nanometers, defects such as jumps in the edge area of the ITO layer removed can lead to short circuits and consequently to failure of the component. To manipulate or even prevent such defects, a thorough understanding of the ablation process and the physical interactions involved is necessary.In order to identify these mechanisms, the driving forces of the ablation process and to guide the development of a mathematical-physical model, experimental process observables are investigated, which describes both the dynamics and the energetics of the process. The simulative and experimental results are used for the iterative development of a Metamodel. A Metamodel is a computational look-up table for the continuous approximation of the relation between parameters and criteria (process map). Compared with the analysis of data from single simulation runs or experiments, the Metamodel allows a global analysis using rigorous, mathematical methods on interpolated, arbitrarily dense data. At the end of the project, the developed Metamodel is expected to predict measurable and verifiable target variables such as grating heights, substrate damage, insulation resistances and crack lengths as a function of the process parameters.

在该项目中，将发展对使用超短脉冲激光辐射应用于 ITO（氧化铟锡）的透明导电层的所谓部分和间接诱导激光烧蚀的基本了解。结果是元模型形式的描述，它是从模拟和实验数据中获得的。通过选择性地使用这种激光诱导烧蚀，导电结构被分离或结构化，从而产生组件的功能表面，例如发光二极管的前电极。由于最终组件通常由层厚度在几十到 100 纳米范围内的多个薄膜组成，因此去除的 ITO 层边缘区域中的跳跃等缺陷可能会导致短路，从而导致组件故障。为了操纵甚至防止此类缺陷，必须彻底了解烧蚀过程和所涉及的物理相互作用。为了识别这些机制、烧蚀过程的驱动力并指导数学物理模型的开发，对实验过程可观测值进行了研究，它描述了该过程的动力学和能量学。模拟和实验结果用于元模型的迭代开发。元模型是一个计算查找表，用于参数和标准之间关系的连续近似（流程图）。与对单个模拟运行或实验的数据进行分析相比，元模型允许对内插的任意密集数据使用严格的数学方法进行全局分析。在项目结束时，开发的元模型预计将预测可测量和可验证的目标变量，例如光栅高度、基板损坏、绝缘电阻和裂纹长度作为工艺参数的函数。