Time-resolved microscopy and model-based analysis of Transparent Conductive Oxides thin-film ablation by spatial and temporal shaped ultrashort pulsed laser radiation

空间和时间成形超短脉冲激光辐射透明导电氧化物薄膜烧蚀的时间分辨显微镜和基于模型的分析

基本信息

项目摘要

In this project, a basic understanding of the so-called partial and indirectly induced laser ablation of transparent, conductive layers using ultra-short pulsed laser radiation applied to ITO (Indium Tin Oxide) is to be developed. The result is a description in the form of a Metamodel, which is obtained from simulations and experimental data. By selective use of this laser-induced ablation, electrically conductive structures are separated or structured producing functional surfaces for components, such as front electrodes of a light-emitting diode. Since the end components often consist of several thin films with layer thicknesses in the range of a few tens to 100 nanometers, defects such as jumps in the edge area of the ITO layer removed can lead to short circuits and consequently to failure of the component. To manipulate or even prevent such defects, a thorough understanding of the ablation process and the physical interactions involved is necessary.In order to identify these mechanisms, the driving forces of the ablation process and to guide the development of a mathematical-physical model, experimental process observables are investigated, which describes both the dynamics and the energetics of the process. The simulative and experimental results are used for the iterative development of a Metamodel. A Metamodel is a computational look-up table for the continuous approximation of the relation between parameters and criteria (process map). Compared with the analysis of data from single simulation runs or experiments, the Metamodel allows a global analysis using rigorous, mathematical methods on interpolated, arbitrarily dense data. At the end of the project, the developed Metamodel is expected to predict measurable and verifiable target variables such as grating heights, substrate damage, insulation resistances and crack lengths as a function of the process parameters.
在本项目中,将对使用超短脉冲激光辐射应用于ITO(氧化铟锡)的透明导电层的所谓部分和间接诱导激光烧蚀进行基本了解。其结果是一个描述的元模型的形式,这是从模拟和实验数据。通过选择性地使用这种激光诱导烧蚀,导电结构被分离或结构化,从而产生用于诸如发光二极管的前电极的部件的功能表面。由于终端组件通常由层厚度在几十到100纳米范围内的几个薄膜组成,因此被去除的ITO层的边缘区域中的缺陷(例如跳跃)可能导致短路并因此导致组件的故障。为了控制甚至防止这种缺陷,烧蚀过程和所涉及的物理相互作用的透彻理解是必要的,为了识别这些机制,烧蚀过程的驱动力,并指导一个物理物理模型的发展,实验过程的可观测量进行了调查,它描述了动力学和能量的过程。仿真和实验结果用于迭代开发的元模型。元模型是一个计算查找表,用于参数和标准(过程图)之间关系的连续近似。与单个模拟运行或实验的数据分析相比,Metamodel允许使用严格的数学方法对插值的任意密度的数据进行全局分析。在项目结束时,开发的元模型预计将预测可测量和可验证的目标变量,如光栅高度,基板损坏,绝缘电阻和裂纹长度作为工艺参数的函数。

项目成果

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Professor Dr.-Ing. Arnold Gillner其他文献

Professor Dr.-Ing. Arnold Gillner的其他文献

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{{ truncateString('Professor Dr.-Ing. Arnold Gillner', 18)}}的其他基金

ArchiTissue - 3D-Architecture of biohybrid cardiovascular implants by additive manufacturing
ArchiTissue - 通过增材制造生物混合心血管植入物的 3D 架构
  • 批准号:
    403170227
  • 财政年份:
    2018
  • 资助金额:
    --
  • 项目类别:
    Research Grants
The Impact of sub-µm Surface Topography on Pluripotent Stem Cells
亚微米表面形貌对多能干细胞的影响
  • 批准号:
    402197212
  • 财政年份:
    2018
  • 资助金额:
    --
  • 项目类别:
    Research Grants
Nanoskalige Biofunktionalisierng von Polymeroberflächen durch Laserstrahlung zur Steuerung der Zelldifferenzierung
使用激光辐射控制细胞分化的聚合物表面纳米级生物功能化
  • 批准号:
    79275432
  • 财政年份:
    2009
  • 资助金额:
    --
  • 项目类别:
    Priority Programmes
Auswirkungen von Werkstoffeigenschaften und Bestrahlungsbedingungen auf die Fügenahtqualität beim Laserstrahlschweißen von Thermoplasten
热塑性塑料激光束焊接过程中材料性能和辐照条件对接头质量的影响
  • 批准号:
    33954691
  • 财政年份:
    2007
  • 资助金额:
    --
  • 项目类别:
    Research Grants
Qualitätsoptimiertes Laserstrahl-Mikroschweissen durch örtliche und zeitliche Leistungsmodulation
通过空间和时间功率调制实现质量优化的激光束微焊接
  • 批准号:
    24408994
  • 财政年份:
    2006
  • 资助金额:
    --
  • 项目类别:
    Research Grants
Effizienzsteigerung beim Mikroabtrag mit Festkörperlasern durch tailored pulse trains - TPT
通过定制脉冲序列提高固态激光器微烧蚀效率 - TPT
  • 批准号:
    5375002
  • 财政年份:
    2002
  • 资助金额:
    --
  • 项目类别:
    Priority Programmes
Functional surface structuring of biomedical micro parts with laser radiation
利用激光辐射对生物医学微型零件进行功能性表面结构化
  • 批准号:
    5289858
  • 财政年份:
    2000
  • 资助金额:
    --
  • 项目类别:
    Priority Programmes
Mikroumformen mit lokaler Bauteilerwärmung durch Laserstrahlung in transparenten Werkzeugen
在透明工具中使用激光辐射对部件进行局部加热的微成型
  • 批准号:
    5161703
  • 财政年份:
    1999
  • 资助金额:
    --
  • 项目类别:
    Priority Programmes
Bearbeitungsverfahren von weichen Funktionsmaterialien zur Herstellung diagnostischer und therapeutischer Mikrobauteile in der Medizin
用于生产医学诊断和治疗微元件的软功能材料的加工工艺
  • 批准号:
    5084480
  • 财政年份:
    1997
  • 资助金额:
    --
  • 项目类别:
    Priority Programmes
Design and load-bearing behaviour of joints with fully-threaded-screws pre-drilled with laser-technique - continuation of projekt
采用激光技术预钻孔的全螺纹螺钉接头的设计和承载性能 - 项目的延续
  • 批准号:
    406036741
  • 财政年份:
  • 资助金额:
    --
  • 项目类别:
    Research Grants

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Pump field probe magnetic field effect fluorescence microscopy for time-resolved radical pair detection in biological systems
用于生物系统中时间分辨自由基对检测的泵场探针磁场效应荧光显微镜
  • 批准号:
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用于生物系统中时间分辨自由基对检测的泵场探针磁场效应荧光显微镜
  • 批准号:
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合作研究:利用时间分辨电子显微镜、数据分析和模拟量化支撑金属纳米颗粒的粗化动力学
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"On the Fly" Time Resolved Cryo-EM Studies of Intermediate HIV-1 RT Transition States
HIV-1 中间 RT 过渡态的“动态”时间分辨冷冻电镜研究
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Deciphering atomic-level enzymatic activity by time-resolved crystallography and computational enzymology
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