The development of the system for analyzing thin-film structure by using grazing incidence diffraction technique

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The diffractometer for grazing incidence diffraction (GID) has been developed, which can be used for thin-film structure analysis by using specular reflection technique. High quality of the data was obtained by using this instrument. A new diffractometer for asymmetric diffraction experiment has also been developed by modifying the instrument for GID.For quantitative analysis of thin-film structures, the use of parallel-beam geometry is essntially important, because the focusing (divergent-beam) geometry induces the degradation of diffraction profiles. Profiles in asymmetric diffraction were examined in both theory and experiment using synchrotron radiation parallel-beam geometry and pseudo-parallel-beam geometry in a laboratory system developed in the present project. It has been demonstrated that the present laboratory system is very useful for the quantitative study of thin-film structure analysis.A computer software for analyzing grazing incidence diffraction patterns has been developed.