Techniques to Estimate Mechanical Properties of Thin Film Using Contact Theory for Muti-laminate

使用多层板接触理论估算薄膜机械性能的技术

• 批准号: 04452121
• 负责人: ODA Juhachi
• 金额: $ 4.16万
• 依托单位: Kanazawa University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-04452121/
• 关键词: Thin Film; Muti-Laminate; Matrix; Contact Theory; Elastic Property; Non-elastic Property; Inverse Analysis; Finite Element Method; ヤング率; ポアソン比

Theoretical and experimental techniques to estimate mechanical properties of thin films are studied. The studies are summarized as follows :(1)By appplying the Hertzian contact theory and assuming a stress field in the film-coated body, an approximate solution of elastic contact problem between film-coated bodies is proposed. By using the solution, a technique to estimate Young's modulus and Poisson's ratio of thin films is proposed and applied to an experimental model.(2)A technique to estimate Yielding point and work hardening ratio of thin films is proposed using the elasto-plastic finite element method.(3)The bending theory of a muti-laminate subjected to thermal load is proposed. By using this theory, Young's modulus and Poisson's ratio of thin films are estimated and compared with the corresdponding experimental values.

研究了薄膜力学性能的理论和实验方法。主要研究成果如下：(1)应用赫兹接触理论，假设被膜体内部存在应力场，给出了被膜体间弹性接触问题的近似解。利用该解，提出了一种估算薄膜杨氏模量和泊松比的方法，并将其应用于实验模型。(2)提出了一种用弹塑性有限元法估算薄膜屈服点和加工硬化比的方法。(3)提出了多层板在热载荷作用下的弯曲理论。利用这一理论对薄膜的杨氏模量和泊松比进行了估计，并与实验值进行了比较。

项目成果

尾田十八: "接触論を利用した薄膜の機械的特性評価法" 日本機械学会RC113分科会研究成果報告書. 309-319 (1994)

Juhachi Oda：“使用接触理论评估薄膜机械性能的方法”日本机械工程师学会RC113小组委员会研究结果报告309-319（1994）。

Juhachi ODA,Takashi KUBOTA and Shingo ABE: "Approximate Solution of the Elastic Contact Problem Between Film-Coated Bodies" Transaction of JSME. Vol.59-567. 109-114 (1993)

Juhachi ODA、Takashi KUBOTA 和 Shingo ABE：“薄膜涂层体之间弹性接触问题的近似解决方案”JSME 交易。

Juhachi ODA,Jirou SAKAMOTO and Shingo ABE: "Conveniett Equations for Thermal Stress Analysis of Electronic Device Leads Using Beam Theory" Transaction of JSME. Vol.61. (1995)

Juhachi ODA、Jirou SAKAMOTO 和 Shingo ABE：“Conveniett Equations for Thermal Stress Analysis of Electronic Device Leads using Beam Theory” JSME 交易。

尾田 十八: "Approximate Solution on the Elastic Contact Problems between Two-layered Bodies" Proceedings of the 33rd SDM. 965-969 (1992)

Juhachi Oda：“两层体之间弹性接触问题的近似解决方案”第 33 届 SDM 会议记录 965-969 (1992)。

尾田 十八: "接触論を利用した薄膜のヤング率とポアソン比の推定法" 第16回NCP研究会. 17-20 (1993)

小田十八：“使用接触理论的薄膜杨氏模量和泊松比的估计方法”第16届NCP研究组（1993）。