Techniques to Estimate Mechanical Properties of Thin Film Using Contact Theory for Muti-laminate

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Theoretical and experimental techniques to estimate mechanical properties of thin films are studied. The studies are summarized as follows :(1)By appplying the Hertzian contact theory and assuming a stress field in the film-coated body, an approximate solution of elastic contact problem between film-coated bodies is proposed. By using the solution, a technique to estimate Young's modulus and Poisson's ratio of thin films is proposed and applied to an experimental model.(2)A technique to estimate Yielding point and work hardening ratio of thin films is proposed using the elasto-plastic finite element method.(3)The bending theory of a muti-laminate subjected to thermal load is proposed. By using this theory, Young's modulus and Poisson's ratio of thin films are estimated and compared with the corresdponding experimental values.