Study of micro-testing method evaluating mechanical properties of micro-elements

在本研究中，提出了微观元素动态分析的理论方法和评价力学性能的新的微观测试方法。1.微单元动力分析的理论方法研究提出了一种适用于多层合结构的特殊有限元方法和特殊梁理论。这些方法适用于由薄膜和平板组成的多层叠层结构的应力分析。薄膜拉伸测试新方法的研究提出了一种由薄膜平行部和基板组成的拉伸试件。通过测量薄膜平行部的位移和试件的总拉力，反分析得到薄膜的应力应变关系。新的薄膜剪切和双向拉伸试验方法的研究尽管进行了单轴拉伸试验，但试件对象部分的应力状态是双向拉伸应力的纯剪切。这种独特的样本可以通过使用拓扑优化技术来确定。在新的剪切试件上，用AI板进行了有效性检验。

In this study, theoretical techniques to analyze dynamically the micro-elements and new micro-testing methods evaluating the mechanical properties are proposed. These studies are as follows ;1. Studies of theoretical techniques to analyze dynamically micro-elementsA special finite element method and a special beam theory for multiple laminated structures are proposed. These methods are used for the stress anlyses of multiple laminated structures composed of thin films and plates.2. Studies of new tensile test method for thin filmsA tensile test specimen composed of thin film with parallel part and matrix plate is proposed. By measuring the displacement at the parallel part of film and the total tensile force of specimen, the stress-strain relation of film is obtained inverse-analytically.3. Studies of new shearing and bi-axial tensile test methods for thin filmsIn spite of an uni-axial tensile test, the stress condition in the object part of specimen is pure shear of bi-axial tensile stress. Such an unique specimen can be determined by using topological potimization techniques. On the new shearing test specimen, the validity is examined by using AI plate.