权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Development of A New Method of Preparing R-Fe-N Based Magnets

一种制备R-Fe-N基磁体新方法的开发

基本信息

批准号：
05650308
负责人：
FUKUNAGA Hirotoshi
金额：
$ 1.09万
依托单位：
Nagasaki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1993
资助国家：
日本
起止时间：
1993 至 1994
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05650308/
关键词：
Laser Deposition Sm-Fe-N Nitride Nitrogenation Magnets レーザディポジッション

项目摘要

Sm_2Fe_<17>N_3 based alloys are promising candidates for high performance magnet materials because of their superior magnetic properties such as high Curie temperature, high saturation magnetization, and large uniaxial magnetic anisotropy. However, Sm-Fe-N magnets applicable to practical uses have not been prepared. The difficult in preparing practical magnets can be attributed to the difficult in the preparation process of Sm_2Fe_<17>N_3 compound. Thus the purpose of this project is to develop a new method of preparing magnets based on Sm_2Fe_<17>N_3 compound directly from Sm_2Fe_<17> alloy without using the conventional powder metallurgy and gas absorption process.We started the research with using the sputtering method, but could not obtained desirable results. Thus we adopted the laser deposition method which is one of the best method for the reactive vapor deposition. Then, we prepared Sm-Fe-N films with varying deposition conditions such as the target compositon, the kind and pressure of gasses, the substrate temperature, and the after-deposition heat treatment temperature. Main results are summarized as follows.1. Films deposited in nitrogenating atmosphere include nitrogen in their bodies. However, nitrogen in the films exists in the form of SmN rather than Sm_2Fe_<17>N_3.2.Sm_2Fe_<17>N_3 films were not synthesized in the as-deposited state within our deposition conditions : the target composition of 10-14at.%Sm, the substrate temperature of 20-400ﾟC,the nitrogenating gas of N_2 or NH_3, and the gas pressure of 0-100mTorr.3. Sm_2Fe_<17>N_3 was synthesized by the heat treatment of the films deposited in vacuum or low pressure (5mTorr NH_3)and the subsequent nitrogenation. Although the obtained films show the coercivity, its value is much smaller than that obtained by the conventional method. Thus the precipitation of alpha-Fe should be suppressed in the process.

Sm_2Fe_N_3<17>基合金具有高的居里温度、高的饱和磁化强度和大的单轴磁各向异性等上级磁性能，是一种很有前途的高性能磁体材料。然而，还没有制备出适用于实际用途的Sm-Fe-N磁体。Sm_2Fe_N_3化合物的制备工艺困难是导致实际磁体制备困难的主要原因<17>。因此，本课题的目的是研究一种新的方法，即<17><17>不采用传统的粉末冶金和气体吸收工艺，直接由Sm_2Fe_3合金制备Sm_2Fe_N_3基磁体，我们采用溅射法进行了研究，但没有得到理想的结果。因此我们采用了反应气相沉积的最佳方法之一的激光沉积方法。然后，通过改变靶材成分、气体种类和压强、衬底温度以及沉积后的热处理温度等沉积条件，制备了Sm-Fe-N薄膜。主要研究结果如下：1.在氮化气氛中沉积的膜在它们的主体中包括氮。2.在<17><17>本实验条件下，沉积态的Sm_2Fe_N_3薄膜中没有生成Sm_2Fe_ N_3薄膜Sm，衬底温度为20-400 ℃，氮化气体为N_2或NH_3，气体压力为0- 100 mTorr。在<17>真空或低压（5 mTorr NH_3）中对沉积的Sm_2Fe_N_3薄膜进行热处理，然后氮化，得到Sm_2Fe_N_3薄膜。虽然所获得的薄膜显示的结晶度，其值是远远小于通过常规方法获得的。因此，在该过程中应抑制α-Fe的沉淀。