PLASMA NITRIDING OF TITANIUM ALLOY

为研究氢对钛离子渗氮及氮化钛形成的影响，采用100%N_2气体或25%N_2~75%H_2气体在1073K进行离子氮化。用光学显微镜和扫描电子显微镜观察渗氮层的组织结构。用X射线衍射仪和掠入射X射线衍射仪鉴定了离子渗氮形成的物相，用X射线光电子能谱分析了样品表面的物相。此外，还利用光学发射光谱对离子渗氮或溅射过程中等离子体中的物种进行了鉴定，发现在氮气中加入氢使TiN更容易形成。TiN是由两个基本过程形成的：激发态物种在不溅射的情况下直接反应，以及溅射的钛原子与激发态物种结合的重吸收过程。

To invetigate the effect of hydrogen on the plasma nitriding of titanium or on forming titanium nitride, plasma nitriding wwas carried out using either 100%N_2 gas or 25%N_2-75%H_2 gas at 1073 K.An optical microscope and scanning electron microscope were used to observe the microstructure of the nitriding layr. While x-ray diffraction and grazing incident x-ray diffraction techniques were used to identify the phase formed by the plasma nitriding, and an x-ray photoelectron spectroscope was used to analyze the phase on the specimen surface. Furthermore, optical emission spectroscopy was also used to identify the species in the plasma during the plasma nitriding or sputtering.The addition of hydrogen to the nitrogen was found to make TiN easeir to form. TiN is formed by two elementary processes : a direct reaction by the exited species without sputtering, and reabsorption from the sputtered Ti combined with the excited species.