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In-Situ Gravimetrical Study on Corrosion Reaction of Metal Thin Film by a Quartz Oscillator

石英振荡器对金属薄膜腐蚀反应的原位重量分析研究

基本信息

批准号：
63470052
负责人：
SEO Masahiro
金额：
$ 3.39万
依托单位：
Hokkaido University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1988
资助国家：
日本
起止时间：
1988 至 1989
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-63470052/
关键词：
Quartz Oscillator Quartz Crystal Microbalance In-Situ Gravimetry Minute Corrosion Thin Film Corrosion

项目摘要

1. In-Situ Gravimetry of Atmospheric Corrosion of Metal Thin Film in Air: The system in which the weight change due to atmospheric corrosion of metal thin film in air was capable of monitoring automatically from the change in resonance frequency of quartz oscillator and the atmospheric corrosion-accelerated test apparatus in which the relative humidity and the concentration of pollutant gas in air were capable of controlling at constant temperature were constructed for this research. The corrosion behaviors of copper thin film in air containing 20 ppm of SO_2 or H_2S at 30C were monitored as a function of relative humidity in air from the change in resonance frequency of quartz oscillator. The presence of H_2S rather than SO_2 gave the more severe corrosion environment for copper thin film. The corrosion rate increased rapidly with increasing the relative humidity and oxygen in air promoted the corrosion rate.It is made clear that the atmospheric corrosion of copper thin film proceeds with an electrochemical mechanism operative in a water film with several monolayers formed on the copper surface.2. In-Situ Gravimetry of Minute Corrosion of Metal thin Film in Aqueous solution: The specially designed oscillating circuit was constructed to stabilize the oscillation of quartz in aqueous solution. The anodic oxidation of copper thin film in pH 8.4 borate solution was investigated by simultaneous measurements of change in resonance frequency of quartz oscillator and time-variation of anodic current. The separation of the dissolution rate of copper ions through the anodic oxide film and the uptake rate of oxygen ions into the film during the film growth was made from the comparison of the in-situ gravimetrical and electrochemical data. The anodic oxidation mechanism of copper thin film was revealed in detail from the relation between the separated two rate components.

1.金属薄膜在空气中大气腐蚀的原位重量法该系统能根据石英振荡器谐振频率的变化和大气腐蚀的影响，自动监测金属薄膜在空气中的大气腐蚀重量变化。加速试验装置，其中的相对湿度和污染气体的浓度在空气中能够控制在恒温下，为这项研究而建。通过石英振荡器谐振频率的变化，监测了铜薄膜在30 ℃、含20ppm SO_2或H_2S的空气中的腐蚀行为与空气中相对湿度的关系。H_2S比SO_2的存在对铜薄膜的腐蚀环境更为严重。随着相对湿度的增加，铜薄膜的腐蚀速率迅速增加，空气中的氧气促进了铜薄膜的腐蚀，说明铜薄膜的大气腐蚀是在铜表面形成多个单层的水膜中进行的电化学腐蚀.金属薄膜在水溶液中微腐蚀的原位重量分析：为了稳定石英在水溶液中的振荡，设计了特殊的振荡电路。用石英振荡器谐振频率的变化和阳极电流的时变同时测量的方法研究了铜薄膜在pH8.4的硼酸盐溶液中的阳极氧化过程。通过原位重量分析和电化学数据的比较，分离了铜离子通过阳极氧化膜的溶解速率和膜生长过程中氧离子进入膜的吸收速率。从分离出的两个速率分量之间的关系，详细揭示了铜薄膜的阳极氧化机理。