Development of Metallic Targets with Highly Durability by means of a Hot Spot Deposition

通过热点沉积开发具有高耐用性的金属靶材

• 批准号: 04804013
• 负责人: SUGAI Isao
• 金额: $ 1.47万
• 依托单位: University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-04804013/
• 关键词: Carbon Storipper Foils; Discharge Arc; Deposition Films; Refractory Metals; High Temperature; Compound Materials; 炭素ストリッパー膜; 直流交流アーク放電; 金属化合物膜; 高融点金属

We found that the carbon particles emitted from a hot plasma spot of the cathode surface during DC arc discharge compose of cluster particles of large size (0.5mum). The carbon particles by a conventional thermal evaporation compose of fine particles (0.002mum).We applied this phenomena to develop very thin metallic compound foils. Here, in the DC arc discharge, the anode is composed of the carbon rod and the cathode to make the high density hot plasma is composed of the metallic rod to be evaporated.We could be successfully prepared Aluminized Carbon, Titanium Carbon, Iron Carbon and Hafnium Carbon Foils of self-supporting with 5-20mug/cm^2 by means of the hot plasma spot evaporation, and we measured the lifetimes of the foils made by the present method using Ne^+ ion beam with 3.2 MeV and -3muA current intensity from the Van de Graaff Accelerator at the Tokyo Institute of Technology.From the experiment, we found the metallic compound foils made by the presented hot spot evaporation have a very high durability for heavy ion beam bombardment with high beam current.This new evaporation method is confirmed to be useful for preparation not only carbon stripper foils with long lived lifetime but also metallic compound target foils with very thin and self-supporting(5mug/cm^2 to 20mug/cm^2).

我们发现，在直流电弧放电过程中从阴极表面的热等离子体点发射的碳颗粒组成的大尺寸（0.5 μ m）的簇颗粒。通过传统的热蒸发的碳颗粒组成的细颗粒（0.002 μ m）。我们应用这一现象开发非常薄的金属化合物箔。这里，在直流电弧放电中，阳极由碳棒组成，阴极由金属棒组成，使高密度的热等离子体蒸发，我们可以成功地制备出5- 20 μ g/cm ^2的自支撑的铝碳、钛碳、铁碳和铪碳箔，我们使用东京工业大学的货车德格拉夫加速器上的3.2 MeV和-3 μ A电流强度的Ne^+离子束测量了用本方法制备的箔的寿命。从实验中可以看出，结果表明，采用热斑蒸发方法制备的金属化合物薄膜对强流重离子束轰击具有很高的耐受性，这种新的蒸发方法不仅适用于制备碳剥离膜，不仅具有长寿命，而且还具有非常薄和自支撑的金属化合物靶箔（5 μ g/cm ^2至20 μ g/cm ^2）。

项目成果

若杉晶彦,菅井勲: "Ion-Sputtering atomic source for high-resolution laser spectroscopy of retractory elements" Review of Scientific Instruments. 64. 3487-3491 (1993)

Akihiko Wakasugi、Isao Sugai：“用于回缩元素高分辨率激光光谱的离子溅射原子源”科学仪器评论 64. 3487-3491 (1993)。

菅井勲,小柳津充広: "Development of heavy ion beam sputtering method for long-lived Carbon Stripper foils" Nuclear Instruments and Methods in Physics Research A. 320. 18-24 (1992)

Isao Sugai、Mitsuhiro Koyanaizu：“长寿命碳剥离箔的重离子束溅射方法的开发”核物理研究仪器和方法 A. 320. 18-24 (1992)

I.Sugai and M.Oyaizu et al.: "The influence of light gas and metallic elements admixture on the litetime of carbon stripper foils." Nuclear Instruments and Methods in Physics Research A. (to be submitted).

I.Sugai 和 M.Oyaizu 等人：“轻质气体和金属元素混合对碳剥离箔寿命的影响。”

I.Sugai et al.: "Development of heavy ion beam sputtering method for long lived carbon stripper foils." Nuclear Instruments and Methods in Physics Research A. 320. 18-24 (1992)

I.Sugai 等人：“开发用于长寿命碳剥离箔的重离子束溅射方法。”

H.Muto and I.Sugai et al.: "Development of a highly reproducible mixed ion beam sputtering method for long lived Carbon stripper foils." Nuclear Instruments and Methods in Physics Research J. 83. 14-17 (1993)

H.Muto 和 I.Sugai 等人：“开发一种用于长寿命碳剥离箔的高度可重复的混合离子束溅射方法。”