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Development of Micro Solar Boat Employing Ion Drag Force

利用离子曳力的微型太阳能船的研制

基本信息

批准号：
05805008
负责人：
TSUCHIDA Nuio
金额：
$ 1.28万
依托单位：
Toyota Technological Institute
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1993
资助国家：
日本
起止时间：
1993 至 1994
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05805008/
关键词：
ion drag force micromachine micro-actuator solar cell gallium arsenide イオンドラグ力

项目摘要

As the power source for a Micro Solar Boat (MSB) to be developed, we have fabricated a new micro solar cell, which consists of four cells made of GaAs connected in series. The size of the micro solar cell is about 700mum*900mum. The open-circuit voltage of 3.8 V was obtained, and the short-circuit current amounted to 19muA when it was illuminated by a laser beam of 2.3 mW.Since the required voltage for a driving electrodes of 20mum spacing is 3 V,the above characteristics of the micro solar cell is enough to be used in the MSB.In a seriesly-connected solar cell module, a short-circuited cell would decrease the total output voltage. To avoid this, the yield of the micro solar cells on a wafer should be high. Inspection by electron beam induced current (EBIC) images was usefully employed in evaluating the solar cells.On the other hand, as the driving mechanism for the MSB,a pair of interdigital electrodes has been designed to facilitate a uniform flow of fluid, while a barrier layr that … More prevent charge exchange of ions was redesigned to protect most of the electrode, which results in less erosion of the metal electrode. With these considerations micro interdigital electrodes were fabricated on wafer, and fluid flow characteristics as well as current-voltage characteristics were examinedimmersed in liquid. The experiment showed, for example, that application of 3 V resulted in the fluid flow velocity of the order of 1 cm/s and the current of 0.1muA in the liquid of butyl alcohol.In combining the two elements in an MSB,a whole structure was designed into 0.8mm*1.2mm, and process techiniques needed to complete it were developed : a via-hole techniqued to connect the interdigital electrodes on the rear surface to the micro solar cell on the front surface, and a technique to form electrodes and lead lines on undulated wafers. The completed MSBs were tested floated on water under the light beam of a high-power diode laser. The motion was recorded by a video recorder and then analyzed. Continual straight movements in an expected direction was observed for four minutes, and the average velocity was 0.1mm/s. Thus we have succeeded in developing a novel micromachine named Micro Solar Boat, which employs an ion drag effect as its driving force.In addition, the same driving principle was applied to a rotary microactuator, where electrohydrodynamic flow by the iron drag force rotated a rotor of 4mm across. A DC motor that has a spped of 3000rpm has been successfully fabricated. Less

作为微型太阳能船（MSB）的电源，我们制作了一种新型的微型太阳能电池，它由四个GaAs电池串联组成。微型太阳能电池的尺寸约为700 μ m × 900 μ m。当用2.3mW的激光束照射时，获得了3.8V的开路电压，并且短路电流总计为19 μ A。由于20 μ m间距的驱动电极所需的电压为3V，所以微型太阳能电池的上述特性足以用于MSB。在串联连接的太阳能电池模块中，短路的单元将降低总输出电压。为了避免这种情况，晶片上的微型太阳能电池的产量应该很高。另一方面，作为MSB的驱动机制，设计了一对叉指电极，以促进流体的均匀流动，而阻挡层， ...更多信息防止离子的电荷交换被重新设计，以保护大部分电极，从而减少对金属电极的侵蚀。在此基础上，在硅片上制作了微叉指电极，并在液体中对微叉指电极的流动特性和电流-电压特性进行了测试。实验表明，例如，在丁醇液体中，施加3V导致1 cm/s数量级的流体流速和0.1 μ A的电流。在将两个元件结合在MSB中时，将整个结构设计为0.8mm*1.2mm，并开发了完成它所需的工艺技术：一种将背面的叉指电极连接到正面的微型太阳能电池的通孔技术，以及一种在波状晶片上形成电极和引线的技术。在高功率二极管激光器的光束下，完成的MSB漂浮在水面上进行测试。运动被录像机记录下来，然后进行分析。观察到沿预期方向的连续直线运动持续4分钟，平均速度为0.1mm/s。因此，我们成功地研制出了一种新型的微机械--微型太阳船，它利用离子拖曳效应作为驱动力，并将同样的驱动原理应用于旋转微致动器，其中电流体动力学流动通过铁拖曳力使4 mm宽的转子旋转。研制成功了转速为3000 rpm的直流电动机。少