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STUDIES ON MICRO-PUMP EMPLOYING ELECTRO-HYDRO-DYMAMIC STREAM

电液动力微泵的研究

基本信息

批准号：
07650069
负责人：
TSUCHIDA Nuio
金额：
$ 1.28万
依托单位：
TOYOTA TECHNOLOGICAL INSTITUTE (T.T.I.)
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07650069/
关键词：
Micro machine Micro pump Micro actuator Ion drag Force EHD EHD流

项目摘要

We have developed micro pumps that use ion dragging generated by DCvoltage. Positive and negative electrodes are alternately placed, and a half of each electrode is covered with insulating film. The operating liquid is a mixture of 1-butyl alcohol : silicone=1 : 1. With three pairs of metal mesh electrodes, 18mm in diameter and 30mm in total length, pressure is proportional to the number of active pairs were obtained. Much smaller devices were fabricated on silicon wafers with 250 pairs of interdigitated electrodes. The width and spacing of the electrode fingers are both 20mm. Liquid flow rate of 2 mm/s was observed at the applied voltage of 50V,where the current was 10mA.When the composition of operating liquid is changed, flow of liquid was not observed even at the same current level. It is concluded that ion-drag micro pumps are possible when appropriate ion species are supplied and the liquid has appropriate resistivity for acceleration of ions at acceptably low voltages.When a set of subsidiary electrodes covered with insulating film was used instead of covering a half of each electrode, the flow direction was reversed. This is explained by formation of an ion sheath around each subsidiary clectrode, since the subsidiary electrode is covered with insulating film, and charge exchange is prohibited on it. The ion sheath will build up a new electric field opposite to that of the applied voltage. This effect has then been applied to a novel ion-drag motor, which has subsidiary covered electrodes between each of the main bare electrodes. In this new device, the polarity of the voltage applied to the subsidiary electrodes can successfully control the rotating direction of motor.

我们开发了利用直流电压产生的离子拖动的微型泵。正、负极交替放置，每个电极的一半用绝缘膜覆盖。操作液体为1-丁醇：硅胶= 1:1的混合物。采用三对直径为18mm、总长度为30mm的金属网状电极，得到的压力与活动电极对数成正比。更小的器件是用250对交错电极在硅片上制造的。电极指的宽度和间距均为20mm。施加电压为50V，电流为10mA时，液体流速为2mm /s。当改变工作液的组成时，即使在相同的电流水平下，也没有观察到液体的流动。结论是，当提供适当的离子种类和液体在可接受的低电压下具有适当的离子加速电阻率时，离子拖动微泵是可能的。当使用一组覆盖有绝缘膜的辅助电极而不是覆盖每个电极的一半时，流动方向被逆转。这可以通过在每个副电极周围形成离子鞘来解释，因为副电极被绝缘膜覆盖，并且禁止在其上进行电荷交换。离子鞘将形成一个与施加电压相反的新电场。这种效应随后被应用于一种新型离子拖动电机，它在每个主裸电极之间都有辅助覆盖电极。在这种新装置中，施加在副电极上的电压的极性可以成功地控制电机的旋转方向。