Property Control of Diamond-like Carbon Thin Films Synthesized by High Density Plasma

高密度等离子体合成类金刚石碳薄膜的性能控制

• 批准号: 06650739
• 负责人: TANABE Yasuhiro
• 金额: $ 1.15万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-06650739/
• 关键词: Carbon thin film; Property; sp^2; sp^3 bonds; Electron beam; Plasma; Control; sP^3結合; 電子ビーム照射; 高密度プラズマ

Recently, many types of diamond and diamond-like carbons are synthesized by various methods. However, the properties of the synthesized thin films, the ratio of sp^2/sp^3 bonds and also the relationship between the properties and the synthesis condition are still remained unclear.In this study, we concerned the effect of synthesis condition on the ratio, physical and chemical properties of the films. MPD Arc-Jet (Magneto Plasma Dynamic Arc-Jet), which was developed for the space thruster, was used for the synthesis, because of the following reasons : (1) It can produce plasma using only pure hydro carbon gases, (2) Equipment for synthesizing copper thin films and producing a pulsed electron beam can be attached to the MPD Arc-Jet easily.Summarizing the results as follows ; the ratio can be controlled by controlling the substrate temperature, bias potential of the substrate, and also so-called in situ modification using CF_4 gas. By changing the ratio, density, hardness and electrical conductivity can be controlled.In a research for shock treatment of carbon and for carbon plasma by electrical explosion, transformation of graphite carbon into diamond was realized easily in a case of coexisting with copper. Copper usually act as a heat tank, however, it really seems to act as a substrate for epitaxy growth. Therefore, this hypothesis is applied to this synthesis in MPD Arc-Jet : graphite layr is sandwiched between two copper layrs synthesized by MPD Arc-Jet and a pulsed electron beem is exposed to the sandwiches type films. Particles, in a small area, consisting with only sp^3 bond canbe detected by Raman spectroscopy.We have to advance this technique and research the role of copper in this transformation.We all thank Dr.G.BURKHARD for his grate assistance in synthesizing materials, etc.

近年来，通过各种方法合成了多种类型的金刚石和类金刚石碳。然而，合成的薄膜的性质、sp^2/sp^3键的比例以及这些性质与合成条件的关系还不清楚，本论文主要研究了合成条件对薄膜的sp^2/sp^3键比例、物理和化学性质的影响。MPD电弧喷射磁等离子体动态电弧喷射（MagnetoPlasmaDynamicArc-Jet）是为空间推进器研制的一种用于铜薄膜的合成方法，其主要原因是：（1）磁等离子体动态电弧喷射可以用纯碳氢化合物气体产生等离子体;（2）磁等离子体动态电弧喷射可以方便地连接到铜薄膜合成装置上，并产生脉冲电子束。通过控制衬底温度、衬底偏压和CF_4气体的原位改性可以控制该比例。通过改变配比，可以控制密度、硬度和电导率，在对碳的冲击处理和电爆炸碳等离子体的研究中，在与铜共存的情况下，很容易实现石墨碳向金刚石的转变。铜通常充当热槽，然而，它似乎真的充当外延生长的衬底。因此，将这一假设应用于MPD Arc-Jet中的这种合成：石墨层被夹在由MPD Arc-Jet合成的两个铜层之间，并且脉冲电子束暴露于三明治型膜。拉曼光谱可以探测到小范围内的仅由sp^3键组成的粒子，我们必须推进这项技术，研究铜在这种转变中的作用，我们都感谢G.BURKHARD博士在合成材料等方面的巨大帮助。

项目成果

G.Burkhard 他: "Carbon Phase Transitsion by dynamic Shock Compression of a Copper/Graphite Powder Mixture" Jpn.J.Appl.Phys.33. L876-L879 (1994)

G.Burkhard 等人：“通过铜/石墨粉末混合物的动态冲击压缩实现碳相变”Jpn.J.Appl.Phys.33 (1994)。

G.Burkhard et al.: "A Modified MPD-Arcjet System for Thim Film Deposition of Carbon and Copper" Report of RLEM,TIT. No.19. 245-261 (1994)

G.Burkhard 等人：“用于碳和铜薄膜沉积的改进 MPD-Arcjet 系统”RLEM、TIT 的报告。

G.Burkhard, K.Dan, Y.Tanabe, A.B.Sawaoka and K.Yamada: "Carbon Phase Transition by Dynamic Shock Compression of a Copper/Graphite Powder Mixture" JJAP. 33. L876-L879 (1994)

G.Burkhard、K.Dan、Y.Tanabe、A.B.Sawaoka 和 K.Yamada：“通过铜/石墨粉末混合物的动态冲击压缩实现碳相变”JJAP。

G.BURKHARD 他: "Carbon Phase Transition by Dynamic Shock Compression of a Copper/Graphite Powder Mixture" Jpn. J. Appl. Phys.33. L876-L879 (1994)

G.BURKHARD 等人：“铜/石墨粉末混合物的动态冲击压缩的碳相变”J.Appl.33 (1994)。

S.MIYAKAWA 他: "Anisotropic Heating of a Copper and Graphite Powder Mixture during an Electrical Column Explosion" Jpn. J. Appl. Phys.34. 2004-2005 (1995)

S. MIYAKAWA 等人：“电柱爆炸期间铜和石墨粉末混合物的各向异性加热”J. Appl. 2004-2005 (1995)。