Fundamental investigations on the pre-process and in-operando oxidation of triboactive hard thin films

摩擦活性硬薄膜的预处理和操作中氧化的基础研究

• 批准号: 448604890
• 负责人: Dr. Michael Paulus, since 4/2021
• 金额: --
• 依托单位: Lehrstuhl für Experimentelle Physik I
• 依托单位国家: 德国
• 项目类别: Research Grants
• 资助国家: 德国
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/448604890?language=en
• 关键词: Fundamental; investigations; pre; process; operando

In the proposed research project, a basic understanding of the relationships of atomic structure, microstructure, oxidation resistance and frictional behavior of Al-rich sputtered AlCrVY(O)N thin films is to be obtained. For this purpose, the thin films are deposited by means of magnetron sputtering on a WC-Co substrate, of which many tools consist. The aim is the deposition of AlCrVY(O)N coatings, which form self-lubricating vanadium oxide phases, so-called Magnéli phases, at elevated temperatures of 500°C to 1000°C, which significantly reduce the coefficient of friction. At the same time, it is of great importance that the known positive mechanical properties of the AlCrN coatings are maintained at these high temperatures. However, pure AlCrN thin films are not suitable for tribological and, in particular, friction-minimizing applications due to an increased coefficient of friction at elevated temperatures. The central aspect is the analysis of the influence of the pre-oxidation during the thin film synthesis on the tribological properties as well as the change of the oxide phases during use in laboratory scale. In comparison, oxygen-free AlCrVYN thin films are also produced and compared. For this purpose, the temperature-induced change in the structure of AlCrVY(O)N thin films, which are synthesized using different energetically high deposition methods, are investigated by means of X-ray diffraction (XRD) and X-ray absorption near-edge structure spectroscopy (XANES) using synchrotron radiation on the macroscopic and atomic scale with respect to oxidation formation of vanadium phases and oxidation resistance of the Al and Cr phases. The aim is the basic understanding of the influence of the deposition parameters and the pre-oxidized state on the structural effects of the coating properties and thus the possibility to develop friction-minimizing coatings with good mechanical properties at high temperature applications.

在拟议的研究项目中，原子结构，微观结构，抗氧化性和摩擦行为的富铝溅射AlCrVY（O）N薄膜的关系的基本理解是获得。为此目的，通过磁控溅射在WC-Co衬底上沉积薄膜，其中许多工具组成。目的是沉积AlCrVY（O）N涂层，在500°C至1000°C的高温下形成自润滑的氧化钒相，即所谓的Magnéli相，从而显著降低摩擦系数。同时，在这些高温下保持AlCrN涂层的已知积极机械性能是非常重要的。然而，纯AlCrN薄膜不适合于摩擦学，特别是摩擦最小化应用，因为在升高的温度下摩擦系数增加。重点分析了薄膜合成过程中预氧化对摩擦学性能的影响以及实验室规模使用过程中氧化物相的变化。作为比较，还制备了无氧AlCrVYN薄膜并进行了比较。为此，研究了AlCrVY（O）N薄膜结构的温度诱导变化，该薄膜是使用不同的高能量沉积方法合成的，的研究通过X射线衍射（XRD）和X射线吸收近边结构光谱（XANES），使用同步辐射在宏观和原子尺度上的钒相的氧化形成和抗氧化性的Al和Cr相。目的是基本了解沉积参数和预氧化状态对涂层性能的结构效应的影响，从而开发在高温应用下具有良好机械性能的摩擦最小化涂层的可能性。