Development of Three-dimensional Micro/nano Fabrication Process with Particulate Materials

颗粒材料三维微纳制造工艺发展

• 批准号: 14205024
• 负责人: TSUMORI Fujio
• 金额: $ 31.45万
• 依托单位: KYOTO UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14205024/
• 关键词: 3D micro fabrication; particulate material; connection of particles; micro array; pulse current induced sintering; micro structure; micro actuator; spark plasma sintering; 3次元マイクロファブリケーション; マイクロアクチュエーター; ラピッドプロトタイピング; 粒子積層; 放電焼結; 液滴生成

Powder particles are set into three-dimensional space to fabricate micro structure. Three approaches are employed to make structures in the present study as following, 1) Welding by spark plasma between particles, 2) Using droplets by electro-static force and 3) Self-assembling by magnetic field in magnetic particles.1. Welding by spark plasma between particlesTwo particles are welded when high voltage is applied between them. It is found by tensile test that the particles are connected strongly. The other hand, the particles could be also connected by Joule heating. However, the connection is not so strong in this case. It is shown how to establish the connection during pulse current induced process.We also develop very small SPS powder compaction system to fabricate micro structure. In this process, the effect of the pulse current obtained from above experiment is utilized.2. Using droplets by electro-static forceSlurry of fine particles and liquid are utilized to make a droplet. The slurry is put into glass capillary and high voltage is applied between the capillary and a base plate. The droplet fly to the plate from the tip of the capillary to fabricate small dots on the plate.3. Self-assembling by magnetic field in magnetic particlesThe magnetic particles form structures such as line or columnar pattern in the magnetic field. We control the movement of the particles by the field. The micro structure is filled into the viscous rubber and after solidified the rubber the structure is observed. The rubber with the magnetic particles' structure can be used as a micro actuator.

将粉末颗粒置于三维空间中以制造微结构。本研究主要采用三种方法来制备磁性纳米结构：1）粒子间的火花等离子体焊接，2）静电力作用下的液滴，3）磁场作用下的磁性粒子自组装.粒子间火花等离子体焊接当在两个粒子之间施加高电压时，两个粒子被焊接。拉伸试验表明，颗粒间连接牢固。另一方面，粒子也可以通过焦耳加热连接。然而，在这种情况下，这种联系并不那么强。介绍了如何在脉冲电流诱导过程中建立连接。我们还开发了非常小的SPS粉末压制系统来制造微结构。在这个过程中，利用了上述实验中得到的脉冲电流的作用.通过静电力使用液滴利用细颗粒和液体的浆体来形成液滴。将浆料放入玻璃毛细管中，并在毛细管和基板之间施加高电压。液滴从毛细管的尖端飞到板上，在板上形成小的点。磁性粒子的磁场自组装磁性粒子在磁场中形成线状或柱状等结构。我们通过场来控制粒子的运动。将微结构填充到粘性橡胶中，并在橡胶固化后观察其结构。具有磁性颗粒结构的橡胶可用作微驱动器。

项目成果

FEM-DEM連成モデルによる磁場中粒子挙動解析

使用 FEM-DEM 耦合模型分析磁场中的颗粒行为

• 发表时间: 2005
• 期刊: 粉体および粉末冶金 52-6
• 作者: 津守不二夫;平田正道;島進
• 通讯作者: 島進

Super fine patterning processes - nano/micro patterning processes -

超精细图案化工艺-纳米/微米图案化工艺-

• 发表时间: 2005
• 作者: D.Shaltiel;Fujio Tsumori et al.
• 通讯作者: Fujio Tsumori et al.

津守不二夫, 島 進: "電圧印加法による微小液滴のOn-Demand生成と応用"粉体粉末冶金協会平成15年度春季大会. (2003)

Fujio Tsumori、Susumu Shima：“通过电压施加方法按需生成和应用微滴”粉末冶金学会 2003 年春季会议（2003 年）。

Simulation of Column Structure Growth of Magnetic Powder in Applied Magnetic Field by Coupled FEM-DEM Modeling

FEM-DEM耦合建模模拟磁粉在外加磁场中柱状结构的生长

• 发表时间: 2005
• 期刊: Intelligent Processing and Manufacturing of Materials
• 作者: Fujio Tsumori;Susumu Shima
• 通讯作者: Susumu Shima

Simulation of Powder Behavior in Applied Magnetic Field by Coupled FEM-DEM Modeling

通过 FEM-DEM 耦合建模模拟粉末在外加磁场中的行为

• 发表时间: 2005
• 期刊: Journal of Japan Society of Powder and Powder Metallurgy Vol.52-3
• 作者: Fujio TSUMORI;Masamichi HIRATA;Susumu SHIMA
• 通讯作者: Susumu SHIMA