Soft micro actuator with interaction between magnetic elements

本文提出并研制了一种利用微磁元件相互作用的微致动器。利用磁相互作用有两个优点；首先，我们可以获得许多变形的变化，其次，由于其简单的机构，可以制造更小的结构。本工作开发了一些新的制备工艺。有限元磁性分析也显示了磁性元件之间相互作用的有效性。最后，介绍了一种由磁场驱动系统驱动的人造纤毛。

A micro actuator using interactions between many micro magnetic elements was proposed and developed in this work. There are two merits using the magnetic interactions; the first is that we can obtain many variations of deformations, and the second is that smaller structure can be fabricated because of its simple mechanism.Some new fabrication processes were developed in the present work. Finite element magnetic analysis was also performed to show effectiveness of the interactions between the magnetic elements. Finally, an artificial cilium, which was actuated by a newly developed system for application of magnetic field, was demonstrated.