Measurement system of fluctuation map of strength and mechanical properties of nano-scale materials using nano-positioning technique

本研究的主要目的是开发一种新的测量系统，使我们能够了解纳米尺度下材料的强度和机械性能波动的原因。对于用于半导体器件等的功能材料，高温燃气轮机考虑到纳米尺度的晶体织构的波动，我们的测量系统测量材料。在此基础上，研究发现，当纳米级织构由细柱状结构和弱晶界组成时，就会出现三维各向异性力学性能。此外，氧空位和间隙碳原子等点缺陷导致材料的禁带宽度严重下降，从而严重影响材料的电子可靠性。由于这种点缺陷在材料中扩散迅速， ...更多信息 发现降解位点即使在室温下也容易移动。这些分析估计的结果证实了在SPring-8同步辐射光电子能谱实验。并应用量子化学分子动力学方法，对燃气涡轮机系统用高温合金的劣化机理进行了研究。应力诱导的各向异性扩散被发现发生在合金中，并改变材料的纳米级织构从最初分散的细多晶织构到单轴排列的粗织构。最后，利用同步辐射光电子能谱技术，成功研制了一套基于纳米定位技术的纳米材料强度和力学性能波动图测量系统。测量的空间分辨率为20 nm，负载的分辨率为1 nN。该体系是解释高功能材料强度和力学性能波动机理的有力工具。少

The main purpose of this research is to develop a new measurement system that enables us to understand the reason for the fluctuation of the strength and mechanical properties of materials in nano-scale.The mechanism of the fluctuation of various physical properties has been clarified for the functional materials used in such as semiconductor devices, high-temperature gas turbines considering the fluctuation of nano-scale crystallographic texture of the materials measured by our measurement system. Based on this research activity, it was found that the three-dimensional anisotropic mechanical properties appeared when the nano-scale texture consisted of fine columnar structure with weak grain boundaries. In addition, various point defects such as oxygen vacancies and interstitial carbon atoms caused serious decrease of band gap of high-k materials and thus deteriorated the electronic reliability of the material significantly. Since such point defects diffused in the materials rapidly, t … More he degraded sites were found to move easily even at room temperature. These analytically estimated results were confirmed by experiments using synchrotron-radiation photoemission spectroscopy at SPring-8. Furthermore, the degradation mechanism of high-temperature alloys used for a gas turbine system was made clear by applying quantum chemical molecular dynamics. The stress-induced anisotropic diffusion was found to occur in the alloys and to change the nano-scale texture of the materials from initially dispersed fine polycrystalline texture to the uni-axially aligned coarse texture. The predicted phenomenon was also validated by the synchrotron-radiation photoemission spectroscopy.Finally, a new measurement system for detecting the fluctuation map of strength and mechanical properties of nano-scale materials using nano-positioning technique has been developed successfully. The spatial resolution of the measurement is 20 nm, and the resolution of the load is 1 nN. This system is a strong tool for explicating the fluctuation mechanism of strength and mechanical properties of highly functional materials. Less