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Fabrication and Optical Properties of Ferroelectric Photonic Crystals by Electrophoretic Epitaxial

电泳外延铁电光子晶体的制备及其光学性能

基本信息

批准号：
16206065
负责人：
KUWABARA Makoto
金额：
$ 32.61万
依托单位：
Kyushu University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2004
资助国家：
日本
起止时间：
2004 至 2006
项目状态：
已结题

项目摘要

This research concerns the fabrication and optical properties of ferroelectric photonic crystals by a sol-gel method combined with electron-beam lithography used for preparation of resist molds. Specifically, an investigation on a set of the following experiments has been made and the main results obtained are described below.1. Fabrication of two-dimensional (Pb, La)(Zr, Ti)O_3 [PLZT] photonic crystals using a sol-gel method and their optical properties :2D-photonic crystals consisting of PLZT ceramic pillars arrayed in a hexagonal lattice have been successfully fabricated on Nb-doped SrTiO_3 [Nb-STO] single crystal substrates, which are conductive and act as electrode, by casting a commercially obtained PLZT precursor solution into resist molds formed on the Nb-STO substrates using electron beam (EB) lithography, followed by firing at 725℃ in air. The obtained 2D-PLZT photonic crystals were confirmed to exhibit characteristic optical reflection spectra attributable to photonic band g … More aps (PBGs) formed in the photonic crystals. And moreover, the individual PLZT pillars have been revealed to be ferroelectric, confirmed by measurements of piezoelectric response characteristics using scanning probe microscopy (SPM).2. Fabrication of BaTiO_3 [BTO] photonic crystals by electrophoretic deposition (EPD) of BTO nanocrystals:2D-photonic crystals consisting of BTO ceramic pillars arrayed in a hexagonal lattice have been successfully fabricated on Pt/SiO_2/Si substrates, on which resist molds were formed by EB-lithography, by an EPD method using suspension of 10-15 nm BTO nanocrystals synthesized by high concentration alkoxides sol-gel method. Nanocrystalline BTO pillars were heat-treated at 600-700℃ in air to sinter them. The obtained individual BTO pillars exhibited definite ferroelectricity, confirmed by measurements of piezoelectric response characteristics by SPM.3. Observation of epitaxial assembly of BTO nanocrystals into aggregates with crystallographic single crystal nature :Fabrication of BTO micropatterns with crystallographic single crystal nature by nanocrystals EPD is the main objective of this research. To make it possible the establishment of a technique that can realize formation of nanoparticles aggregation self-assembled to have the same crystallographic coordinates is a must. We succeeded for the first time in finding definite evidence for epitaxial assembly of BTO nanocrystals in aggregates produced under hydrothermal conditions, confirmed by analyses of their dark-field and high resolution transmission electron microscopy (TEM) images and electron diffraction images. Less

本研究系以溶胶-凝胶法结合电子束微影技术制备铁电光子晶体，并探讨其光学性质。具体地说，对以下一组实验进行了研究，获得的主要结果如下所述。溶胶-凝胶法制备（Pb，La）（Zr，Ti）O_3 [PLZT]二维光子晶体及其光学性能研究：通过电子束光刻法在导电的SrTiO_3 [Nb-STO]单晶基片上形成抗蚀剂模，然后在725℃下烧结，成功地在该基片上制备了由六方晶格的PLZT陶瓷柱组成的二维光子晶体。所得到的2D-PLZT光子晶体被证实表现出特征的光学反射光谱归因于光子带g ...更多信息光子晶体中形成的光子带隙（PBG）。此外，使用扫描探针显微镜（SPM）测量压电响应特性，证实了单个PLZT柱是铁电体.电泳沉积（EPD）法制备BaTiO_3 [BTO]光子晶体：采用高浓度醇盐溶胶-凝胶法制备了10-15 nm的BTO纳米晶悬浮液，在Pt/SiO_2/Si衬底上，通过电子束光刻法制备了由BTO陶瓷柱组成的二维光子晶体。纳米晶BTO柱在空气中600-700℃热处理后烧结。所得到的个别BTO支柱表现出一定的铁电性，证实了由SPM的压电响应特性的测量。观察BTO纳米晶体外延组装成具有晶体学单晶性质的聚集体：通过纳米晶体EPD制造具有晶体学单晶性质的BTO微图案是本研究的主要目标。为了使其成为可能，必须建立一种能够实现具有相同晶体学坐标的纳米颗粒自组装聚集体的形成的技术。我们首次成功地找到了在水热条件下产生的聚集体中BTO纳米晶体外延组装的明确证据，通过分析其暗场和高分辨率透射电子显微镜（TEM）图像和电子衍射图像证实。少