Creation of single-molecule CMOS hybrid devices

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On-chip measurement of single-molecule and biosensor army TM, for electrical detection of biomolecular interaction have been developed to create single-molecule CMOS hybrid devices1.On-chip measurement of single-moleculeSince signal from single-molecule is very small, on-chip measurement under the molecule is essential for the reliable and stable detection. New analog CMOS integrated circuits have been designed. After the fabrication of chip using standard CMOS process, 15 nm gap electrodes were formed by electron beam lithography or molecular ruler method using self-assembled monolayer. Poly(3-octylthiophene-2,5-diyl)was investigated which has electrical resistance of several On. Since CMOS analog integrated circuit converts output impedance, high signal to noise ratio and high speed measurements were achieved.Another device investigated is the close-packed structure of 3 nm diameter gold colloidal particles between gold electrodes formed by Langmuir-Brodget method. Dodecanthiol molecules are bridged between gold colloidal particles with distance of 4.6 nm, and electrical signals by DNA replacement and hybridization were detected.2.Fully electrical detection biochipNew analog CMOS circuit was proposed based on the detection of charge associated with specific biomolecular interaction. Extended gate MOSFETs are utilized to sense biomolecular interaction. The sensor interface circuit features high density(1/1000 of conventional circuit), low power(1/1000 of conventional circuit), and high accuracy (x 1000 of conventional circuit), so massively parallel and high throughput detection of biomolecular interactions becomes possibleGold patterns were formed as extended gate on fabricated CMOS LSI chip, and thiol modified oligonucleotides were immobilized on the extended gate. Immobilization and hybridization of DNA were detected by 16 x 16 sensor array as time development of the two-dimensional spatial distribution.