Creation of single-molecule CMOS hybrid devices

片上测量的单分子和生物传感器军TM，用于生物分子相互作用的电检测已经发展到创建单分子CMOS混合器件1。单分子的片上测量由于来自单分子的信号非常小，因此在分子下进行片上测量对于可靠、稳定的检测至关重要。设计了新的模拟CMOS集成电路。在采用标准CMOS工艺制作芯片后，采用电子束光刻或分子尺法利用自组装单层形成15 nm的间隙电极。研究了具有若干On电阻的聚（3-辛基噻吩-2,5-二基）。由于CMOS模拟集成电路转换输出阻抗，实现了高信噪比和高速测量。另一种装置是用Langmuir-Brodget方法在金电极之间形成直径为3nm的金胶体颗粒的紧密堆积结构。十二烷醇分子在金胶体颗粒之间架桥，桥接距离为4.6 nm，通过DNA置换和杂交检测到电信号。提出了一种基于检测与特定生物分子相互作用相关的电荷的新型模拟CMOS电路。扩展栅mosfet用于感知生物分子相互作用。该传感器接口电路具有高密度（传统电路的1/1000）、低功耗（传统电路的1/1000）和高精度（传统电路的1000倍）的特点，使生物分子相互作用的大规模并行和高通量检测成为可能。通过16 × 16传感器阵列检测DNA的固定和杂交情况，并随时间的发展进行二维空间分布。

On-chip measurement of single-molecule and biosensor army TM, for electrical detection of biomolecular interaction have been developed to create single-molecule CMOS hybrid devices1.On-chip measurement of single-moleculeSince signal from single-molecule is very small, on-chip measurement under the molecule is essential for the reliable and stable detection. New analog CMOS integrated circuits have been designed. After the fabrication of chip using standard CMOS process, 15 nm gap electrodes were formed by electron beam lithography or molecular ruler method using self-assembled monolayer. Poly(3-octylthiophene-2,5-diyl)was investigated which has electrical resistance of several On. Since CMOS analog integrated circuit converts output impedance, high signal to noise ratio and high speed measurements were achieved.Another device investigated is the close-packed structure of 3 nm diameter gold colloidal particles between gold electrodes formed by Langmuir-Brodget method. Dodecanthiol molecules are bridged between gold colloidal particles with distance of 4.6 nm, and electrical signals by DNA replacement and hybridization were detected.2.Fully electrical detection biochipNew analog CMOS circuit was proposed based on the detection of charge associated with specific biomolecular interaction. Extended gate MOSFETs are utilized to sense biomolecular interaction. The sensor interface circuit features high density(1/1000 of conventional circuit), low power(1/1000 of conventional circuit), and high accuracy (x 1000 of conventional circuit), so massively parallel and high throughput detection of biomolecular interactions becomes possibleGold patterns were formed as extended gate on fabricated CMOS LSI chip, and thiol modified oligonucleotides were immobilized on the extended gate. Immobilization and hybridization of DNA were detected by 16 x 16 sensor array as time development of the two-dimensional spatial distribution.