Enhancement of diamond machined RSA-Al501 surfaces for optical applications by process integrated Ion Beam Etching

该项目的总体目标是通过由超精密加工和随后的离子束加工组成的工艺链生产用于UV-VIS范围的金属光学元件。该项目的工作假设是假设超精密加工引起的亚表面的变化对离子束过程产生影响。该项目的目的是获得关于在RSA-501中使用几何定义的金刚石工具进行加工后的材料性能及其对基于离子束的平滑和去除过程的影响的基本知识。在此基础上，提出了在RSA-501上利用离子束加工进行形状修正和表面光顺的工艺策略和工艺参数。通过超精密加工产生连续和不连续的几何形状，目前可以使火焰侧面的粗糙度在RQ&>2 NM范围内。通过在项目中获得的知识，特别是通过研究离子束与表面的相互作用，有望实现形状偏差为&2 nm的RQ&lt；0.5 nm以下的粗糙度[ARC18]。在第二个资助期，它将侧重于提高结构化表面的质量。这包括建立次表层变化类型和特征的基本模型，建立与不同要求相关的加工RSA合金的基本技术基础，以及将两种工艺结合起来以实现总体目标。

The overall objective of the project is the production of metal optics for the UV VIS range through a process chain consisting of ultra-precision machining and subsequent ion beam machining. The working hypothesis of the project is the assumption that the changes in the sub-surface caused by ultra-precision machining have an influence on the ion beam processes. The aim of the project is to gain fundamental knowledge about the material properties after machining with geometrically defined diamond tools in RSA-501 as well as their effects on ion beam-based smoothing and removal processes. From this, process strategies and parameters for shape correction and surface smoothing using ion beam machining in RSA-501 are derived. The generation of the continuous and discontinuous geometries by means of ultra-precision machining currently enables roughness values of the blaze flanks in the range Rq > 2nm. Through the knowledge gained in the project, it is expected that, especially through the investigations of the interaction of ion beam with the surface, roughness values below Rq < 0.5 nm [ARC18] with shape deviations < 2 nm can be realised. In the second funding period, it will be focused on improving the quality of structured surfaces. This includes the basic modelling of the type and characteristics of the change in the sub-surface zone, the establishment of a fundamental technological basis for machining the RSA alloys relevant to the different requirements, and the combination of both processes to achieve the overall goal.