Study on Nano Forming Process of Sub-Wave-Length Optical Diffraction Element

玻璃透镜和微衍射元件广泛应用于数码相机、分光镜等光学设备中。为了精确、高效地制造这些具有表面微结构的光学元件，本研究提出了玻璃模压机（GMP）来产生微结构。这两年的研究成果如下：(1)在镍磷（Ni-P）表面形成最小间距为500 nm的平行微槽。(2)采用有限元法模拟优化了玻璃表面微槽的成形条件。(3)进行了玻璃模压机实验，成功制备了亚波长光学衍射元件。

Glass lens and micro diffraction element are widely used in optical equipment, like digital camera, spectroscope and so on. In order to fabricate these kinds of optical elements with surface microstructures precisely and efficiently, glass molding press (GMP)is proposed to generate microstructures in this research. The following research result and achievement are obtained in these two years.(1)Parallel microgrooves with a minimum pitch of 500 nm are created on the Nickel Phosphorus (Ni-P)surface.(2)The forming condition for creating microgrooves on glass is optimized by Finite Element Method simulation.(3)The experiments of glass molding press were carried out, and sub-wave-length optical diffraction element is successfully generated.