Microsphere resonator based micro-probe for 3-dimensional coordinate metrology

点击翻译按钮获取中文摘要

In order to measure the objective in size below a few millimeters, the nano-coordinate measuring machine(CMM) is highly required. Since the surface sensing probe is a key device for the nano-CMM, we proposed a new probe principle based on the whispering gallery mode(WGM) resonance. For the fundamental experiments, the equipments to generate WGMs with either a prism surface of a tapered optical fiber were developed. Beside, the equipment to evaluate the surface sensing resolution of the WGM probe was developed.