A STUDY ON ULTRA-HARD FILM FORMATION BY MACROPARTICLE ION BEAM WITH HIGH ENERGY

在这个项目中，我们研究了大颗粒如富勒烯(C_&lt；60&gt；)和Ar团簇离子的成膜。此外，我们还研究了离子束与固体表面之间的相互作用。研究发现，大颗粒辐照具有多胶团、高密度辐照等独特的特点，与单体离子辐照有很大的不同。用该方法制备的薄膜维氏硬度值为5000 kg/mm~2，无氢夹杂。这些薄膜具有良好的硬度、附着力和耐磨性，而其他方法制备的薄膜的典型值为3,000 kg/mm~2。在高能大颗粒固体表面进行高密度辐照，可以得到硬度高、表面光滑的富勒烯向类金刚石相转变，这一点也通过基于分子动力学模拟的计算机模拟得到了证实。此外，还研究了在钢、铁等热膨胀系数较高的衬底上沉积薄膜的方法，并将其应用于工业薄膜。

In this project, we have investigated on film formation by using macroparticles such as fullerene (C_<60>) and Argon cluster ions. Also, we have studied on an interaction between ion beams and a solid surface. It was found that irradiation of macroparticles has unique characteristics such as multicollisons, high density irradiation, etc., which deviate significantly from monomer ion irradiation. Films prepared by this method exhibited Vickers hardness value of 5,000 kg/mm^2 and no hydrogen inclusion. These films exhibited good properties of hardness, adhesion and wear resistance, compared with a typical value of 3,000 kg/mm^2 for films prepared by other methods. High density irradiation on a solid surface with high energetic macroparticles was capable to produce the phase modification from fullerene to diamond-like-carbon with high hardness and very smooth surface, which was also clarified by the computer simulation based on molecular dynamic simulation. Furthermore, deposition on substrates with high thermal expansion coefficients such as steel, iron and other materials was studied, and it was capable to apply to the films for industrial use.