Study of Ultraviolet Transmittance Measurement by Photoacoustic Method for next generation of Stepper Lens

下一代步进透镜光声法测量紫外线透过率的研究

• 批准号: 14350221
• 负责人: ISHIMARU Ichirou
• 金额: $ 9.86万
• 依托单位: KAGAWA UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14350221/
• 关键词: Stepper; CaF2; Lens; Transmittance; Absorption Coefficient; Photo Acoustic Spectroscopy; Photothermal effect; Calorimetric measurement

The purpose of this study is establishment of the high precision transmittance measurement technology (accuracy : 0.01%) of the large diameter lens(material : CaF2, diameter : Φ 200mm) for ultraviolet rays (wavelength : 193nm). Transmittance measurement method with photoacoustic spectroscopy is proposed. This technology depends on only photothermal spectroscopy at a local minute area and is independent of lens size. So this proposed method can be applied to large diameter lens. And measurement time at one point is extremely short. So the superiority of this new method is that the transmittance distribution in-plane can be easily measured. It was experimentally verified that this photoacoustic spectroscopy could be applicable to large diameter lens.In the case of transmittance measurement of CaF2 by the excimer laser(ArF) which has high photon energy, the absorption phenomenon of the light energy which is correlated with the residual stress was observed. In this report, we modeled an optical absorption as optical activity, and we verified this model experimentally, the double refraction was measured by strain testing machine (the senarmont method), and the amount of light absorption energy is formulated by dichroism model.

本研究旨在建立大口径透镜（材料：CaF2，直径：Φ 200 mm）对紫外线（波长：193 nm）透过率的高精度测量技术（精度：0.01%）。提出了光声光谱法测量透射率的方法。该技术仅依赖于局部微小区域的光热光谱，并且与透镜尺寸无关。该方法可应用于大口径透镜。而且在一个点上的测量时间非常短。因此，该方法的优点在于可以方便地测量面内透射率分布。实验验证了该光声光谱法可用于大口径透镜的测量，在利用高光子能量的准分子激光（ArF）测量CaF 2透过率的情况下，观察到了与残余应力相关的光能吸收现象。在本报告中，我们建立了一个光学吸收的旋光性模型，我们验证了这个模型，双折射测量的应变测试机（塞纳蒙特方法），光吸收能量的量由二向色性模型制定。

项目成果

H.Tutui, I.Ishimaru, F.Oohira, F.Sirai, K.Hirata: "Residual stress measurement of CaF2 by high photon energy(ArF laser)"Proc.of the Japan Society for Precision Engineering. 1275-1276 (2004)

H.Tutui、I.Ishimaru、F.Oohira、F.Sirai、K.Hirata：“通过高光子能量（ArF 激光）测量 CaF2 的残余应力”日本精密工程学会论文集。

H.Tutui, I.Ishimaru, F.Oohira, K.Hirata: "ULTRAVIOLET PHOTOACOUSTIC TRANSMITTANCE MEASUREMENT FOR LARGE-DIAMETER LENSES"Proc.of XVII IMEKO World Congress. 199-201 (2003)

H.Tutui、I.Ishimaru、F.Oohira、K.Hirata：“大直径透镜的紫外光声透射率测量”第十七届 IMEKO 世界大会的会议记录。

H.Tutui, I.Ishimaru, F.Oohira, K.Hirata: "ULTRAVIOLET PHOTOACOUSTIC TRANSMITTANCE MEASUREMENT FOR LARGE-DIAMETER LENSES"Proc.of XVII IMEKO World Congress. 199-201 (2002)

H.Tutui、I.Ishimaru、F.Oohira、K.Hirata：“大直径透镜的紫外光声透射率测量”第十七届 IMEKO 世界大会的会议记录。

H.Tutui, I.Ishimaru, F.Oohira, K.Hirata: "ULTRAVIOLET PHOTOACOUSTIC TRANSMITTANCE MEASUREMENT FOR LARGE-DIAMETER LENSES"Proc. of XVII IMEKO World Congress. 2003.6発表予定. (2003)

H.Tutui、I.Ishimaru、F.Oohira、K.Hirata：“大直径透镜的紫外光声透射率测量”计划于 2003 年 6 月提交第十七届 IMEKO 世界大会。

筒井宏光, 石丸伊知郎, 大平文和, 白井文夫, 平井健二: "高フォトンエネルギー(ArF)によるフッ化カルシウム内部残留応力の計測"2004年度精密工学会春季大会予稿集. 1275-1276 (2004)

Hiromitsu Tsutsui、Ichiro Ishimaru、Fumikazu Ohira、Fumio Shirai、Kenji Hirai：“使用高光子能量 (ArF) 测量氟化钙中的内部残余应力”2004 年日本精密工程学会春季会议论文集 1275-1276 (2004)。