权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Measurement Technology for Opaque Multilayer Film Thickness by Photothermal Effect

光热效应不透明多层膜厚度测量技术

基本信息

批准号：
16360206
负责人：
ISHIMARU Ichirou
金额：
$ 9.66万
依托单位：
Kagawa University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2004
资助国家：
日本
起止时间：
2004 至 2006
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16360206/
关键词：
film thickness opaque multi-layer noncontact photothermal effect resonance mode rough surface interferometer

项目摘要

We propose the non-contact film thickness measurement method for various materials based on photo thermal effect. We illuminate nanosecond pulse laser to the film surface. The various kinds of elastic waves whose maximum frequency is several hundred MHz are excited by photo thermal effect. And then, only elastic wave which depends on the film thickness remains selectively, because the resonance phenomena occur between boundary surfaces of the acoustic impedance. The film thickness can be calculated from this detected resonance frequency. Currently, we have established the measurement technology which can measures the thickness of the single-layer film by non-contact. In this method, ArF pulse laser illuminates the film surface, and ultrasonic waves is caused by optical absorption at the film surface. A film thickness is measured from the resonance frequency of excited ultrasonic waves. This proposed method can measure extremely varied object. And this proposed method is a non-contact type measurement technology. In this report, we mention the technique of microvibration measurement for rough face by laser interferometer. And, we mention the measurement technique of the multilayer film thickness. There are three kinds of modes in exited resonance phenomenon. These resonance modes depend on the difference of relative acoustic impedance between each material. We applied it to the multilayer film thickness measurement by analyzing these resonance modes in each film. And we selected the frequency analysis window in which the resonance wave was in stable state.

提出了一种基于光热效应的非接触式薄膜厚度测量方法。我们用纳秒脉冲激光照射薄膜表面。利用光热效应激发出最大频率为几百MHz的各种弹性波。然后，由于声阻抗的边界表面之间发生共振现象，只有弹性波选择性地保留，弹性波取决于膜的厚度。薄膜厚度可以通过检测到的共振频率计算出来。目前，我们已经建立了一种非接触式测量单层薄膜厚度的技术。在该方法中，ArF脉冲激光照射薄膜表面，在薄膜表面由光吸收产生超声波。薄膜的厚度是由激发的超声波的共振频率来测量的。这种方法可以测量各种各样的物体。该方法是一种非接触式测量技术。本文介绍了用激光干涉仪对粗糙表面进行微振动测量的技术。并介绍了多层膜厚度的测量技术。出射共振现象有三种模式。这些共振模式取决于每种材料之间相对声阻抗的差异。我们将其应用于多层膜厚度的测量中，分析了各层膜的共振模式。选取谐振波处于稳定状态的频率分析窗口。