Creation of Highly Dense Ceramic Films by Using Magneto-Plasma Dynamic Arc Jets

使用磁等离子体动态电弧喷射创建高致密陶瓷薄膜

• 批准号: 11555255
• 负责人: YOSHIKAWA Takao
• 金额: $ 3.39万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-11555255/
• 关键词: MPD Arc Jet; Electromagnetic Acceleration; Lorentz Force; Plasma Flow; Mullite; Zirconia; Titanium Nitride; Plasma Spraying; プラズマジェット; 電磁気力; セラミックス

In magneto-plasma-dynamic (MPD) arcjet generators, plasma is accelerated by electromagnetic body forces. The MPD arcjet generator can produce higher-velocity, higher-temperature, higher-density and larger-area plasmas than those of conventional thermal plasma torches. For applications of MPD arcjet generators to ceramic coatings, two types of MPD arcjet generators were developed. One was provided with a cathode covered with Mullite or Zirconia ceramics and the other with a titanium cathode. The former was operated with Ar for Mullite or Zirconia coating due to ablation process of the cathode cover and the latter with N_2 for titanium nitride reactive coating. The coating characteristics were evaluated; plasma diagnostic measurement and flowfield analysis were also conducted to understand plasma features and plasma acceleration processes and to clarify relationships between the coating characteristics and the plasma flow characteristics. The coating characteristics evaluated showed that the MPD arcjet generators had high potentials for ceramic spray coatings. In the titanium nitride reactive coating, a large amount of N and N^+ was expected to be exhausted with a high velocity from the MPD generator. Both the electron temperature and the electron number density were kept high at a substrate position compared with those for conventional low-pressure thermal sprayings. A chemically active plasma with excited particles of N^+, Ti, Ti^+ and Ti^<2+> were expected to contribute to better titanium nitride coatings.

在磁等离子体动力学（MPD）电弧加热发动机中，等离子体是由电磁体积力加速的。与传统的热等离子体炬相比，磁等离子体电弧喷射发生器可以产生更高速度、更高温度、更高密度和更大面积的等离子体。为了将磁等离子体电弧加热发生器应用于陶瓷涂层，研制了两种磁等离子体电弧加热发生器。一个提供有覆盖有莫来石或氧化锆陶瓷的阴极，另一个提供有钛阴极。由于阴极盖的烧蚀过程，前者在Ar气氛下进行莫来石或氧化锆涂层，后者在N_2气氛下进行氮化钛反应涂层。对涂层特性进行了评价，并进行了等离子体诊断测量和流场分析，以了解等离子体特性和等离子体加速过程，阐明涂层特性与等离子体流动特性之间的关系。涂层特性评价表明，MPD电弧喷射发生器具有很高的潜力，陶瓷喷涂涂层。在氮化钛反应性涂层中，大量的N和N^+预计将以高速从MPD发生器排出。与传统的低压热喷涂相比，电子温度和电子数密度在基板位置保持较高。具有N^+、Ti、Ti^+和Ti^<2+>激发粒子的化学活性等离子体有望有助于获得更好的氮化钛涂层。

项目成果

Hirokazu Tahara et al.: "Exhaust Plume Charocteristics of Quasi-Steady MPD Throters"27th Int. Electric Propulsion Conf.. 1. 1-9 (2001)

Hirokazu Tahara 等人：“准稳态 MPD 发动机的排气羽流特性”27th Int.

Tetsuji Shibata et al.: "Development of Electromagnetic Acceleration Plasma Generator for Titanium Nithride Coatings"Vacuum. 59.1. 203-209 (2000)

Tetsuji Shibata 等人：“氮化钛涂层电磁加速等离子体发生器的开发”真空。

Hirokazu Tahara et al.: "In-Flight Characteristics of Ceramic Particles Through a Supersonic Nitrogen Plasma Jet Generator with an Expansion Nozzle"Proc. 14th Int. Symp. Plasma Chemistry, Prague. (1999)

Hirokazu Tahara 等人：“陶瓷颗粒通过带有膨胀喷嘴的超音速氮等离子射流发生器的飞行特性”Proc。

Hirokazu Tahara et al.: "Electromognetic Acceleration Plasma Spraying"Proc.14th Int.Symp.Plasma Chemistry. 5. 1977-1981 (1999)

Hirokazu Tahara 等人：“电磁加速等离子喷涂”Proc.14th Int.Symp.Plasma Chemistry。

Tetsuji Shibata et al.: "Development of an Electromagnetic Acceleration Plasma Generator for Titanium Nitride Coatings"Proc. 2nd Int. Symp. Appl. Plasma Sci. Osaka. 239-244 (1999)

Tetsuji Shibata 等人：“用于氮化钛涂层的电磁加速等离子体发生器的开发”Proc。