DEVELOPMENT OF XRF AND XRD ANALYZING MICROSCOPE

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The purpose of this study is to develop newly designed analyzing microscope which detects diffracted X-ray as well as fruolescence X-ray emitted from a sample with primary X-ray irradiation. This equipment will enable us to obtain the information of mineral composition and crystal structure of the sample simultaneously with that of chemical composition. There expected to be broad application field of the equipment in earth sciences or material sciences.In this study, we first developed an algorithm of a image analysis for XRF images obtained by the Scanning X-ray Analytical Microscope (SXAM). This algorithm transforms the XRF images into mineral distribution maps assuming linear relationship of XRF intensities with mineral composition. In the next step, we have been developing the equipment of XRF and XRD microscope. We established the conceptual plan of the equipment and constructed prototype device to determine optimal configuration of X-ray detecting system. Performance tests of the prototype is now on going.