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Development of vacuum ultraviolet Ar_2 excimer laser by laser-heated plasma pumping

激光加热等离子体泵浦真空紫外Ar_2准分子激光器的研制

基本信息

批准号：
12450034
负责人：
OKADA Tatsuo
金额：
$ 6.34万
依托单位：
Kyushu University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

项目摘要

In order to realize a practical Ar_2 excimer laser, we have proposed a new pump scheme to deposit a high power density into a high pressure Ar gas without discharge instability[7-9], In this scheme, a pre-ionized high-pressure Ar gas is irradiated by an intense CO_2 laser beam. The initial electrons are accelerated and heated by the electric field of the CO_2 laser, and an Ar gas is effectively ionized. The advantage of this scheme is that a rapid and intense energy deposition into the gas plasma is possible without being limited by discharge instability. In this paper, we report the vacuum ultraviolet emission characteristics from such a laser-heated high pressure Ar plasma.As the results, a 100 mm-long linear plasma was successfully produced in an Ar gas at a pressure of 20 atmospheres by heating the pre-ionized Ar gas with a TEA CO_2 laser. The VUV emission at 126 nm from the Ar_2 excimers was observed. Although no clear evidence of the stimulated emission has been observed yet, the results indicate that the plasma was produced by a proposed mechanism, not by a simple laser-breakdown. In the present experimental setup, the main components such as pre-ionizer and a set of focusing mirror are installed in a high-pressure gas chamber. This causes some problems in terms of the purity of gas, the pre-ionization and an optical alignment. We are further optimizing the system for the realization of the stimulated emission at 126 nm.

为了实现实用的Ar_2准分子激光器，我们提出了一种新的泵浦方案，在高压Ar气中存款高功率密度而无放电不稳定性[7-9]。初始电子在CO_2激光器的电场作用下被加速和加热，Ar气体被有效电离。该方案的优点在于，快速且强烈的能量沉积到气体等离子体中是可能的，而不受放电不稳定性的限制。本文报道了这种激光加热高压Ar等离子体的真空紫外发射特性，结果表明，用TEA CO_2激光器加热预电离的Ar气体，在20个大气压的Ar气体中成功地产生了100 mm长的线性等离子体。观察到Ar_2准分子在126 nm处的真空紫外发射。虽然还没有观察到受激发射的明确证据，但结果表明等离子体是由一种提出的机制产生的，而不是由简单的激光击穿产生的。在本实验装置中，主要部件如预电离器和一套聚焦镜安装在高压气体室中。这在气体纯度、预电离和光学对准方面引起一些问题。我们正在进一步优化系统，以实现126 nm的受激发射。