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Design of high-performance sensors by using specific sensing function of hetero-junction interfaces between ionic conductor and semiconductor

利用离子导体与半导体异质结界面的特定传感功能设计高性能传感器

基本信息

批准号：
12450346
负责人：
MIURA Norio
金额：
$ 9.6万
依托单位：
KYUSHU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12450346/
关键词：
hetero junction gas sensor solid electrolyte semiconductive oxide ionic conductor stabilized zirconia NASICON

项目摘要

The present study aimed to design, construct and control new hetero-junction interfaces between ionic conductor and oxide semiconductor and then to develop high-temperature sensing devices whose properties were drastically improved by giving specific gas-sensing function. Consequently, the following results were obtained.1) By using an oxide sensing electrode, a stabilized zirconia (YSZ)-based sensor was developed for the selective detection of hydrocarbons at high temperature. Among the 14 kinds of oxide tested, CdO was found to be best suited for the sensing electrode of a tubular device, giving selective and quick response to propylene in air at 600 ℃.2) An YSZ-based sensor using oxide sensing-electrode was also examined for NOx detection. Among spinel-type oxides tested ZnFe_2O_4 has the highest sensitivity to NO_2 in air at temperatures of 550-700 ℃.3) It was found that the combination of YSZ and SnO_2 sensing electrode gave a relatively high sensitivity to N_2O in air at 475 ℃. The addition of a foreign oxide (e.g. Bi_2O_3 and Sm_2O_3) to SnO_2 was effective to improve the N_2O sensitivity.4) A NASICON based CO_2 sensing device with In_2O_3 introduced in the sensing electrode was investigated. It was shown that the CO_2 sensing capability at room temperature was easily attained under humid condition. Some sorts of auxiliary phases such as NaHCO_3 and Na_2CO_3 were suspected to form spontaneously on the NASICON disk surface to give CO_2 sensitivity.5) A NASICON based amperometric sensor was designed for the detection of total NOx in air. To make the device sensitive to both NO_2 and NO, the sensing Au electrode was covered with NO oxidation catalysts. The device attached with double catalyst layers of WO_3 and Pt-loaded SiO_2 produced current response proportional to the concentration of NO_2 or NO up to 1 ppm at 150 ℃.

本研究的目的是设计、构建和控制离子导体和氧化物半导体之间的新型异质结界面，并通过赋予特定的气敏功能来开发性能得到极大改善的高温传感器件。1)利用氧化物传感电极，研制了一种用于高温下碳氢化合物选择性检测的稳定氧化锆基传感器。在所测试的14种氧化物中，氧化镉最适合作为管式装置的传感电极，在600℃时对空气中的丙烯具有选择性和快速的响应。2)还研究了一种基于氧化物传感电极的氮氧化物传感器。在所测试的尖晶石型氧化物中，在550-700℃的温度范围内，ZnFe_2O_4对空气中的NO_2具有最高的灵敏度。3)在475℃的温度下，YSZ和SnO_2传感电极的组合对空气中的N_2O具有相对较高的灵敏度。在SnO_2中添加外加氧化物(如Bi2O_3和Sm_2O_3)可以有效地提高其对N_2O的灵敏度。4)研究了一种在传感电极中引入In_2O_3的NASICON CO_2传感器件。结果表明，在潮湿条件下，可以实现常温下的CO_2传感。NASICON盘片表面可能自发生成NaHCO3和Na2CO3等辅助相，使其对CO2具有较高的灵敏度。5)设计了一种用于检测空气中总NOx的电流型传感器。为了使器件对NO2和NO都灵敏，在敏感的Au电极上覆盖了NO氧化催化剂。该装置采用WO_3和载铂SiO_2双催化层，在150℃时，电流响应与NO或NO的浓度成正比，最高可达1ppm。