Development of 2 dimensional array EUV superconducting tunnel junction detector

点击翻译按钮获取中文摘要

Superconducting tunnel junctions (STJs) are applicable to the photon detectors with an energy resolution and a high photon counting rate. The absorption of a photon in the superconductor of the STJ generates a number of the quasiparticles proportional to the photon energy. STJs especially have a good performance for soft X-ray and extreme ultraviolet (EUV) because of high absorption below 1 keV. We are developing an energy-dispersive photon detector for EUV radiation using STJs with Al trapping layers. We evaluated the performance of the detector for EUV photons using the Synchrotron Facility at KEK-PF in Tsukuba, Japan. We achieved the energy resolution of FWHM=18 eV (including the external noise of 17.6 eV) for 55eV EUV photons with a 100 × 100 um^2 STJ. We succeeded in simultaneous read-out of several pixels. However, the energy resolution was not good under the influence of noise from the read-out circuit. As the next step, we have to improve the read-out circuit.