Development of Energy-dispersive UV Superconducting Tunnel Junction Detectors

能量色散紫外超导隧道结探测器的研制

• 批准号: 12440057
• 负责人: OTANI Chiko
• 金额: $ 10.5万
• 依托单位: RIKEN
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12440057/
• 关键词: Superconducting Tunnel Junction; Detector; Ultraviolet; One-photon Spectroscopy

We developed and fabricated Superconducting Tunnel junction (STI) detectors for one-photon ultraviolet spectroscopy by applying the fabrication process developed for fabricating STJ detectors for X-ray spectroscopy. We introduced the following new processes for the energy-dispersive detection of ultraviolet photons1.the process to remove the covering SiO2 layers accumulated to avoid the damage2.the anodization process of the junction edge to suppress the leakage current3.the increase of the thickness of Al-trapping layers.No.1 caused the direct illumination of ultraviolet photons without absorption by the covering layer. No.2 made it possible to reach down to the leakage current of lnA for the junctions with the critical current of 1 kA/cm^2. No.3 caused the amplification of the signal charges by more than a factor of 5. We succeeded to detect one photon in energy of 47-280 eV by the detector. The energy resolution was 18 eV at 55 eV. In addition, we clarified that the energy resolution of the detector became worse due to the high capacitance of readout stainless coaxial wires. After replacing them, we confirmed that the energy resolution reduced to 1/4. Moreover, we trided to detect optical photons. We succeeded the detection and estimated the energy resolution of 2.4 eV at 13 eV (λ/Δλ〜5) by using the multi-photon events (2-5 photons per event).

我们通过应用为制造 X 射线光谱法 STJ 探测器而开发的制造工艺，开发并制造了用于单光子紫外光谱法的超导隧道结 (STI) 探测器。我们介绍了以下用于紫外光子能量色散检测的新工艺：1.去除堆积的覆盖SiO2层的工艺，以避免损坏；2.结边缘的阳极氧化工艺，以抑制漏电流；3.增加铝捕获层的厚度。No.1导致紫外光子直接照射而不被覆盖层吸收。 No.2 使得临界电流为 1 kA/cm^2 的结点漏电流可降至 lnA。 No.3导致信号电荷放大5倍以上。我们成功地用探测器探测到了能量为47-280 eV的一个光子。 55 eV 时的能量分辨率为 18 eV。此外，我们还澄清，由于读出不锈钢同轴线的高电容，探测器的能量分辨率变得更差。更换它们后，我们确认能量分辨率降低到了1/4。此外，我们尝试探测光学光子。我们成功地进行了检测，并利用多光子事件（每个事件 2-5 个光子）估计了 13 eV 下 2.4 eV 的能量分辨率（λ/Δλ〜5）。

项目成果

H.Sato,T.Ikeda,H.Kato,K.Kawai,H.Miyasaka,T.Oku,W.Ootani,C.Otani,H.M.Shimizu,Y.Takizawa,H.Watanabe 他4名: "Development of Superconducting Tunnel Junctions with Al Trapping Layers for X-ray Detectors"Institute of Physics Conference Series. 167巻. 683-686 (2000

H.Sato、T.Ikeda、H.Kato、K.Kawai、H.Miyasaka、T.Oku、W.Ootani、C.Otani、H.M.Shimizu、Y.Takizawa、H.Watanabe 和其他 4 人：“超导的发展”用于 X 射线探测器的具有铝捕获层的隧道结”物理研究所会议系列。卷 167. 683-686 (2000

C.Otani, Y.Takizawa, H.Sato他9名: "Development of Superconducting Tunnel Junctions as an Energy-Dispersive Detector for UV and Visible Photons"Physica C : Superconductivity. 372-376. 399-402 (2002)

C.Otani、Y.Takizawa、H.Sato 和其他 9 人：“作为紫外和可见光子能量色散探测器的超导隧道结的开发”Physica C：超导性 372-376 (2002)。

C.Otani, T.Ikeda, H.Kato, 他8名: "Spectral Features of Substrate Phonon Events Obtained by Illuminating Superconducting Tunnel Junctions with X-rays"IEEE Transactions on Applied Superconductivity. 11・1. 708-711 (2001)

C.Otani、T.Ikeda、H.Kato 和其他 8 人：“通过 X 射线照射超导隧道结获得的基底声子事件的光谱特征”IEEE 应用超导学报 11・1（2001）。

Y.Takizawa, T.Ebisuzaki, C.Otani, H.M.Shimizu, Y.Takahashi.: "Conceptual design of combined visible-X-ray wide band telescope"Porc.of SPIE, Highly Innovative Space Telescope Concepts. Vol.48-49. 227-234 (2002)

Y.Takizawa、T.Ebisuzaki、C.Otani、H.M.Shimizu、Y.Takahashi.：“组合式可见 X 射线宽带望远镜的概念设计”Porc.of SPIE，高度创新的太空望远镜概念。

C.Otani, Y.Takizawa, H.Sato他9名: "Development of Superconducting Tunnel Junctions as an Enagy-Dispersive Detector for UV and Visible Photons"Physica C : Superconductivity. (出版中). (2002)

C.Otani、Y.Takizawa、H.Sato 和其他 9 人：“作为紫外和可见光子能量色散探测器的超导隧道结的开发”Physica C：超导（出版中）。