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Development and application of surface analysis apparatus using electron-ion coincidence spectroscopy

电子离子符合光谱表面分析装置的研制及应用

基本信息

批准号：
12555007
负责人：
MASE Kazuhiko
金额：
$ 8.38万
依托单位：
High Energy Accelerator Research Organization
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

项目摘要

In 2000-2001 fiscal year we have developed a new electron-ion coincidence (EICO) apparatus composed of a coaxial symmetric mirror electron energy analyzer proposed by Kai Siegbahn, a compact time-of-flight ion mass spectrometer and a positioning mechanism. Auger electron photoion coincidence (AEPICO) measurements of condensed H_2O at 4α_1 ← O 1s resonance showed that time required for a certain coincidence ioin counts is reduced by one order of magnitude in comparison with the previous EICO analyzer using a CMA. With the apparatus we studied fluorination of Si(111) surfaces by XeF_2 using Si 2p - F^+ photbelectron photoion coincidence (PEPICO) and Si 2p photoelectron sjpectroscopy (PES), and found that fluorination of the top-most Si layer proceeds after the initial XeF_2 exposures, while fluorination of the second Si layer starts in 6400-9600 L. In 2002 fiscal year, we have developed a new polar-angle-resolved compact time-of-flight ion mass spectrometer (TOF-MS). The TOF-MS consists of an electric field shield, an ion drift electrode with three meshes, and micro channel plates (MCP) with three concentric anodes. Using it we developed electron - polar-angle-resolved-ion coincidence analjyzer, which offers information on kinetic energy and desorption polar angle of coincidence ions. Its performance was evaluated by measuring H^+ yield spectra and Auger electron - H^+ coincidence spectra of a condensed H_2O. We have written three review articles on EICO spectroscopy. We also reported a PEPICO study on site-specific ion desorption of CF_3CD(OH)CH_3 chemisorbed on Si(100), and a EICO study on H^+ desorption induced by shake up and shake off ionizations of O 1s of H_2O dissociatively chemisorbed op Si(100).

在2000-2001财政年度，我们研制了一种新的电子-离子符合(EICO)装置，它由凯·西格巴恩提出的同轴对称镜面电子能量分析器、紧凑型飞行时间离子质谱仪和定位机构组成。在4α_1←O_1s共振下对凝聚态H2O进行俄歇电子光离子符合测量表明，与以前使用恒模分析的EICO分析仪相比，某些符合碘计数所需的时间减少了一个数量级。用该装置研究了XeF_2对Si(111)表面的氟化作用，用Si2p-F~+光电子符合谱(PEPICO)和Si2p光电子能谱(PES)研究了XeF_2对Si(111)表面的氟化作用，发现最顶层Si的氟化是在XeF_2首次曝光后进行的，而第二层的氟化是在6400-9600 L之间开始的。TOF-MS由电场屏蔽、三网离子漂移电极和三个同心阳极微通道板(MCP)组成。利用它，我们研制了电子-极角分辨离子符合分析器，它提供了符合离子的动能和解吸极角的信息。通过测量凝聚态H2O的H~+屈服谱和俄歇电子-H~+符合谱对其性能进行了评价。我们已经写了三篇关于Eico光谱学的综述文章。我们还报道了化学吸附在Si(100)上的Cf_3Cd(OH)CH_3的定点离子脱附的PEPICO研究，以及化学吸附的OP-Si(100)上H_2O解离的O_1s电离引起的H~+脱附的EICO研究。