Micro/Nanomachined Device for High-density Data Storage

用于高密度数据存储的微/纳米机械设备

• 批准号: 12555015
• 负责人: ONO Takahito
• 金额: $ 8.45万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12555015/
• 关键词: Micromachinihg; Ultra-sensitive sensor; High-Density Data-Storage; Near-field microscopy; Scanning Probe Microscopy; 走査型プローブ顕微鏡; 微小振動子; ナノマシニング; 高感度センシング

Micromachining technology enables to integrate various kinds of micro-electro-mechahical systems used in wide fields. Nano-scale mechanics that are miniaturized from micro to nano scale make the performance higher, especially in mechanical, thermal, optical. properties. Objects of this research are the fabrication and the evaluation of high-density data storage device based on scanning probe microscopy with an ability to write and read bits with the size of 25 nm, which is fabricated by the micro/nanomachining technology. In conventional optical storage, heating by focused laser beam enable to write and read bits on a disk, however, the diffraction of light limits the recording density. To overcome this problem, the focused laser is replaced with many nano-scaled heater as a recording head in this research. In this research, we developed fundamental fabrication technique and demonstrate the performance and other related techniques were investigated. Ultra-thin silicon beams as a high sensitive sensing element are developed and these mechanical properties are characterized. Near-field micro components which can use an extremely localized light-field are developed as well.

微机械加工技术可以集成应用于广泛领域的各种微电子机械系统。纳米尺度的力学从微米到纳米尺度的小型化使其具有更高的性能，特别是在机械、热学、光学等方面。属性。本研究的对象是基于扫描探针显微镜的高密度数据存储器件的制作和评价，该器件采用微/纳米加工技术制作而成，具有25 nm的读写能力。在传统的光存储中，通过聚焦的激光束的加热使得能够在盘上写入和读出位，然而，光的衍射限制了记录密度。为了解决这一问题，本研究用多个纳米级加热器代替聚焦激光器作为记录头。在这项研究中，我们发展了基本的制造技术，并展示了其性能和其他相关技术进行了研究。研制了作为高灵敏度传感元件的超薄硅梁，并对其力学性能进行了表征。还研制了可利用极局域光场的近场微器件。

项目成果

Don-weon Lee,Takahito Ono and Masayoshi Esashi: "High Speed Imaging by Electro-Magnetically Actuated Probe with Dual Spring"Journal of Microelectromecanical Systems. 9・4(発表予定). (2000)

Don-weon Lee、Takahito Ono 和 Masayoshi Esashi：“采用双弹簧电磁驱动探针进行高速成像”《微机电系统杂志》9/4（待发表）。

P.Minh, T.Ono, S.Tanaka, K.Goto, M.Esashi: "Near-field recording with high optical throughput aperture array"Sensors and Actuators A. 95. 168-174 (2002)

P.Minh、T.Ono、S.Tanaka、K.Goto、M.Esashi：“采用高光通量孔径阵列的近场记录”传感器和执行器 A. 95. 168-174 (2002)

P.M. Minh, T. Ono, Masayoshi Esashi: "Fabrication of silicon microprobe for optical near-field applications"CRC press. 165 (2002)

下午。

T.Ono, X.Li, D.W.Lee, H.Miyashita, M.Esashi: "Nanometric Sensing and Processing with Micromachined Functional Probe"International Conference on Solid-State Sensors and Actuators. 11. 1062-1068 (2001)

T.Ono、X.Li、D.W.Lee、H.Miyashita、M.Esashi：“微机械功能探针的纳米传感和处理”固态传感器和执行器国际会议。

P, Minh, T. Ono, S. Tanaka, K.Goto and M. Esashi: "Near-field recording with high optical throughput aperture array"Sensors and Actuators A. 95. 168-174 (2002)

P、Minh、T. Ono、S. Tanaka、K.Goto 和 M. Esashi：“利用高光通量孔径阵列进行近场记录”传感器和执行器 A. 95. 168-174 (2002)