Development of Ultraprecise Positioning XY Table Composed of Pneumatic Servo Bearing Actuators

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We proposed and developed 'pneumatic servo bearing actuator' as a new actuator for ultraprecise positioning. This actuator mainly consisted of a pneumatic servo valve and an aerostatic thrust bearing. It overcame some demerits such as low stiffness and poor response. We confirmed the minimum positioning resolution of the prototype actuator with spherical bearing was 2 nm. As a practical application of the pneumatic servo spherical bearing actuator, a prototype of ultraprecise X-Y stage which consisted of six pneumatic servo bearing actuators was developed. As a result, we confirmed the minimum positioning resolution of the X-Y stage was about 10 nm even without any feedback controls.