DEVELOPMENT AND APPLICATION OF SOFT X-RAY INTERFEROMETER

干涉计量学是现代科学技术中不可缺少的一项重要技术，在可见光领域已得到了相当成功的发展。然而，在软X射线的波长比可见光的波长短得多的区域中，干涉计量术是欠发达的，并且很少有关于利用波动性质的计量学的研究报道。当软X射线干涉仪研制成功后，将会有许多应用领域。然而，由于软X射线的波长短，软X射线光学元件的质量差，阻碍了软X射线干涉测量的发展。我们有建造和操作硬X射线干涉仪的经验，硬X射线的波长比软X射线的波长更短。我们提出这个研究项目是为了将我们的活动扩展到软X射线领域。在硬X射线区，晶体光学元件是可用的，因此干涉仪可以在硬X射线区工作。 ...更多信息 velength（ca. 0.1 nm）。虽然指出了软X射线的一些问题，如没有晶体，干涉仪必须在真空中建造，我们认为，在硬X射线领域取得的成就的基础上，软X射线干涉仪的发展是可以实现的，我们利用独立的Ru/用于分束器的SiN薄膜。我们选择这种配置是因为它的操作相对容易，并且预期有各种应用。我们发现，只有两个精确的调谐阶段，以调整四个光学元件，并制作了一个原型，包括精确的请愿人驱动的压电致动器。此外，由于对准计划很重要，我们设计了一种依赖于可见光激光可见度的方法。使用软X射线的实验在高能加速器研究组织光子工厂进行。不幸的是，我们还没有观察到干扰。我们认为，振动和/或变形的光学元件将负责目前的结果。我们将继续试验，设法解决这些问题。一旦观察到干涉，我们计划增加一种改变光程长度的机制，并继续发展软X射线傅里叶干涉测量法，以实现软X射线光谱学领域的创新能量分辨率。少

Interferometry, which is indispensable in modem science and technology, has been quite successfully developed in the visible light region. In the region of soft X-rays whose wavelength is much shorter than that of visible light, however, interferometry is underdeveloped, and few researches into the metrology taking advantage of wave nature are reported. It is dear that a variety of applications would be opened up when a soft X-ray interferometer is developed. However, the short wavelength of soft X-rays and poor quality of optical elements for soft X-rays have obstructed the development of soft X-ray interferometry. We have experience of constructing and operating interferometers for hard X-rays whose wavelength is further shorter than that of soft X-rays. We proposed this research project as an expansion of our activity into the soft X-ray region. In the hard X-ray region, crystal optical elements are available, and therefore interferometers were operated in spite of the hard-X-ray wa … More velength (ca. 0.1 nm). Although problems characteristic of soft X-rays, such as that crystals are not available, and that an interferometer has to be constructed in vacuum, are pointed out, we consider that the development of a soft X-ray interferometer can be within our scope basing on our achievement in the hard X-ray region.We constructed a Mach-Zehnder type interferometer for 13-nm synchrotron soft X-rays employing free-standing Ru/SiN films for beam splitters. We selected this configuration because its operation is comparatively easy and a variety of applications are expected. We found that only two accurate tuning stages are required in order to align four optical elements, and fabricated a prototype comprising accurate petitioners driven by piezoelectric actuators. Furthermore, because the plan for alignment is important, we devised a method that depends on the visibility of visible laser.Experiments using soft X-rays were canned out at the Photon Factory, High Energy Accelerator Research Organization. Unfortunately, we have not observed interference yet. We consider that vibration and/or deformation of optical elements would be responsible for current results. We will continue experiments, devising to get rid of the problems. Once interference is observed, we have a plan to add a mechanism for changing optical path lengths and to move on the development of soft X-ray Fourier interferometry to realize innovative energy resolution in the field of soft X-ray spectroscopy. Less