DEVELOPMENT AND APPLICATION OF SOFT X-RAY INTERFEROMETER

干涉测量作为现代科学技术中不可或缺的一部分，在可见光领域已经得到了相当成功的发展。然而，在波长远短于可见光的软X射线领域，干涉测量技术还不发达，利用波的性质进行测量的研究也很少。当软X射线干涉仪被开发时，各种各样的应用将被打开是非常宝贵的。然而，软X射线波长较短，软X射线光学元件质量较差，阻碍了软X射线干涉测量的发展。我们有建造和操作波长远短于软X射线的硬X射线干涉仪的经验。我们提出这一研究项目是为了将我们的活动扩展到软X射线领域。在硬X射线区域，晶体光学元件是可用的，因此干涉仪在硬X射线Wa…的情况下运行更长的长度(约0.1纳米)。虽然指出了软X射线的特点，如晶体不可用，干涉仪必须在真空中建立，但我们认为基于我们在硬X射线领域的成就，软X射线干涉仪的研制是可以的。我们利用自支撑的Ru/SiN薄膜搭建了用于13 nm同步加速器软X射线的马赫-曾德型干涉仪。我们之所以选择这种配置，是因为它的操作相对简单，并且预期会有多种应用。我们发现，只需要两个精确的调谐阶段就可以对准四个光学元件，并制作了一个由压电驱动器驱动的精密请愿器的原型。此外，由于对准计划很重要，我们设计了一种依赖于可见光可见度的方法。使用软X射线的实验是在高能加速器研究组织的光子工厂进行的。不幸的是，我们还没有观察到干扰。我们认为，光学元件的振动和/或变形将是造成目前结果的原因。我们将继续试验，想方设法解决这些问题。一旦观测到干涉，我们计划增加一种改变光路长度的机制，并继续发展软X射线傅里叶干涉测量，以实现软X射线光谱领域的创新能量分辨率。较少

Interferometry, which is indispensable in modem science and technology, has been quite successfully developed in the visible light region. In the region of soft X-rays whose wavelength is much shorter than that of visible light, however, interferometry is underdeveloped, and few researches into the metrology taking advantage of wave nature are reported. It is dear that a variety of applications would be opened up when a soft X-ray interferometer is developed. However, the short wavelength of soft X-rays and poor quality of optical elements for soft X-rays have obstructed the development of soft X-ray interferometry. We have experience of constructing and operating interferometers for hard X-rays whose wavelength is further shorter than that of soft X-rays. We proposed this research project as an expansion of our activity into the soft X-ray region. In the hard X-ray region, crystal optical elements are available, and therefore interferometers were operated in spite of the hard-X-ray wa … More velength (ca. 0.1 nm). Although problems characteristic of soft X-rays, such as that crystals are not available, and that an interferometer has to be constructed in vacuum, are pointed out, we consider that the development of a soft X-ray interferometer can be within our scope basing on our achievement in the hard X-ray region.We constructed a Mach-Zehnder type interferometer for 13-nm synchrotron soft X-rays employing free-standing Ru/SiN films for beam splitters. We selected this configuration because its operation is comparatively easy and a variety of applications are expected. We found that only two accurate tuning stages are required in order to align four optical elements, and fabricated a prototype comprising accurate petitioners driven by piezoelectric actuators. Furthermore, because the plan for alignment is important, we devised a method that depends on the visibility of visible laser.Experiments using soft X-rays were canned out at the Photon Factory, High Energy Accelerator Research Organization. Unfortunately, we have not observed interference yet. We consider that vibration and/or deformation of optical elements would be responsible for current results. We will continue experiments, devising to get rid of the problems. Once interference is observed, we have a plan to add a mechanism for changing optical path lengths and to move on the development of soft X-ray Fourier interferometry to realize innovative energy resolution in the field of soft X-ray spectroscopy. Less