Development of mechanical micro-fabrication system using pencil-shape electroformed tool

使用铅笔形电铸工具开发机械微加工系统

• 批准号: 13450061
• 负责人: FUJIYAMA Hirokazu
• 金额: $ 6.78万
• 依托单位: Fukuoka Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13450061/
• 关键词: Microgrinding; Nickel; Phosphorous plating; Micro-Truing; Micro-Dressing; Micro dies and molds; Grinding tool; Diamond tool; Electroforming; 高速電鋳; アモルファスめっき; ダイヤモンド工具; マイクロ金型; マイクロ研削工具; ツルーイング; ドレッシング; cBN砥粒; 研削加工

Development of mechanical microfabrication system using microgrinding was made for the purpose to fabricate 3-dimensional micro dies and molds that could not be fabricated by the conventional techniques, such as LIGA technology and Micro Electro mechanical System MEMS. During last 2 years, the following 3 research projects were conducted.(1)Development of high-speed electroforming technique that can produce electroformed diamond tool with superior bending strength,(2)Development of micro truing and dressing techniques that can fabricate electroformed diamond tool to pencil-shape microgrinding tool under 0.1 mm diameter,(3)Fabrication of 2 and 3 dimensional micro-sized dies and molds using pencil-shape microgrinding tool and ultraprecision machining center.The results obtained could be summarized as follows;(1)Nickel/phosphorous plating technique that can produce an electroformed diamond tool processing the same bending strength with the conventional, cemented carbide tool could be successfully developed.(2) Micro truing and dressing techniques that can fabricate the tool end of the microgrinding tool to spherical and wedge shape could be developed using electroformed diamond tool from #3000 to #8000 in diamond mesh size.(3)It was verified from the grinding test that the microgrinding tool could be adapted to the fabrication of 2 and 3 dimensional micro structures, such as micro-reflectors, micro-reactors and micro-prism arrays.

为了实现LIGA技术和微机电系统MEMS等传统技术无法实现的三维微细模具的加工，开发了基于微磨削的机械微细加工系统。在过去的两年中，进行了以下3个研究项目。（1）开发高速电铸技术，生产出具有上级抗弯强度的电铸金刚石工具;（2）开发微整形和修整技术，将电铸金刚石工具加工成直径小于0.1 mm的锯齿形微磨削工具;（3）使用铅笔-塑料模具制造2维和3维微尺寸模具和模具。成形微磨削工具和超精密加工中心的研究。（1）镍/磷电镀技术，其可以生产加工与常规相同弯曲强度的电铸金刚石工具，硬质合金刀具的研制成功。(2)利用3000 ~ 8000目电铸金刚石工具，可以发展出将微磨削工具的工具端加工成球形和楔形的微整形和修整技术。(3)It实验结果表明，该微磨削工具可用于微反射镜、微反应器、微棱镜阵列等二维和三维微结构的加工。

项目成果

仙波卓弥, 佐伯智之: "高集中度・電鋳工具製造技術の開発とマイクロ研削陽工具への応用"日本機械学会論文集C編. 70-694(印刷中 6月掲載). (2004)

Takuy​​a Senba、Tomoyuki Saeki：“高浓度电铸工具制造技术的开发及其在微磨削正向工具中的应用”，日本机械工程师学会汇刊，C 版（目前正在印刷，六月出版）。 (2004)

Takuya SEMBA, Yutaka KASA: "Development of High-Speed Ni/P Electroforming Technique for Fabricating Microgrinding Tool."Transaction of the Japan Society of Mechanical Engineers. Vol.70-No.694, (in press),C. (2004)

Takuy​​a SEMBA、Yutaka KASA：“用于制造微磨削工具的高速 Ni/P 电铸技术的开发”。日本机械工程师学会汇刊。

H.Fujiyama, T.Sumomogi, T.Endo: "Effect of O_2 gas partia pressure on mechanical properties of SiO_2 films deposited by radion frequency magnetron sputtering"J.Vac.Sci.Technol.A. 20・2. 356-361 (2002)

H.Fujiyama、T.Sumomogi、T.Endo：“O_2 气体分压对射频磁控溅射沉积的 SiO_2 薄膜机械性能的影响”J.Vac.Sci.Technol.A 20・2。 2002）

Takuya SEMBA, Hiroki HIGA, Brian J Stone: "Surface Texturing Using Grinding with Ultrasonic Longitudinal Vibration."Transaction of the Japan Society of Mechanical Engineers. Vol.69-No.681,C. 243-248 (2003)

Takuy​​a SEMBA、Hiroki HIGA、Brian J Stone：“使用超声波纵向振动研磨进行表面纹理化。”日本机械工程师学会汇刊。

仙波卓弥, 冨田直樹, 藤井晋一: "高速・電鋳工具製造技術の開発"日本機械学会論文集C編. 69-679. 217-223 (2003)

Takuy​​a Senba、Naoki Tomita、Shinichi Fujii：“高速电铸工具制造技术的发展”，日本机械工程师学会会刊，C 版 69-679（2003 年）。