Development of mechanical micro-fabrication system using pencil-shape electroformed tool

为了实现LIGA技术和微机电系统MEMS等传统技术无法实现的三维微细模具的加工，开发了基于微磨削的机械微细加工系统。在过去的两年中，进行了以下3个研究项目。（1）开发高速电铸技术，生产出具有上级抗弯强度的电铸金刚石工具;（2）开发微整形和修整技术，将电铸金刚石工具加工成直径小于0.1 mm的锯齿形微磨削工具;（3）使用铅笔-塑料模具制造2维和3维微尺寸模具和模具。成形微磨削工具和超精密加工中心的研究。（1）镍/磷电镀技术，其可以生产加工与常规相同弯曲强度的电铸金刚石工具，硬质合金刀具的研制成功。(2)利用3000 ~ 8000目电铸金刚石工具，可以发展出将微磨削工具的工具端加工成球形和楔形的微整形和修整技术。(3)It实验结果表明，该微磨削工具可用于微反射镜、微反应器、微棱镜阵列等二维和三维微结构的加工。

Development of mechanical microfabrication system using microgrinding was made for the purpose to fabricate 3-dimensional micro dies and molds that could not be fabricated by the conventional techniques, such as LIGA technology and Micro Electro mechanical System MEMS. During last 2 years, the following 3 research projects were conducted.(1)Development of high-speed electroforming technique that can produce electroformed diamond tool with superior bending strength,(2)Development of micro truing and dressing techniques that can fabricate electroformed diamond tool to pencil-shape microgrinding tool under 0.1 mm diameter,(3)Fabrication of 2 and 3 dimensional micro-sized dies and molds using pencil-shape microgrinding tool and ultraprecision machining center.The results obtained could be summarized as follows;(1)Nickel/phosphorous plating technique that can produce an electroformed diamond tool processing the same bending strength with the conventional, cemented carbide tool could be successfully developed.(2) Micro truing and dressing techniques that can fabricate the tool end of the microgrinding tool to spherical and wedge shape could be developed using electroformed diamond tool from #3000 to #8000 in diamond mesh size.(3)It was verified from the grinding test that the microgrinding tool could be adapted to the fabrication of 2 and 3 dimensional micro structures, such as micro-reflectors, micro-reactors and micro-prism arrays.