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Study on Micropump Using Boiling Propagation Phenomena

利用沸腾传播现象研究微型泵

基本信息

批准号：
13555053
负责人：
IIDA Yoshihiro
金额：
$ 6.4万
依托单位：
Yokohama National University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555053/
关键词：
Micropump Boiling Propagation Phenomena Boiling at Pulse Heating Microactuator Using Liquid-Vapor Phase Change Phenomena

项目摘要

A micropump which uses boiling propagation phenomena has been developed. Boiling has been triggered on a film heater, which is heated in a pulsewise manner, by generating a vapor bubble on a local high heat flax section, and unidirectional boiling propagation has been realized over the length of the heater. The heating power conditions under which boiling propagation occurs, configuration of propagation, size of bubbles and propagation velocity have been examined. Continuous pumping action in a U-shaped microchannel via boiling propagation repeated at a frequency of up to 20 Hz has been confirmed by the head difference generated between liquid columns in the vertical section of the channel. Net flow rate has been also measured at a frequency of up to 40 Hz from the displacements of the menisci in tubes both vended horizontally at the same height.Pumping at higher frequencies will be enabled by applying a smaller heater and/or choosing the substrate material and composition such that the temperature increase of the substrate would be suppressed during the repetition of pulse heating. From this viewpoint, the maximum frequency at which the increase in time-averaged heater temperature can be maintained below an allowable limit during pulse heating in microactuators using rapid boiling has been predicted based on a numerical simulation of heat conduction from a heater to adjacent materials. The results show that the allowable frequency increases significantly with a decrease in heater size for prescribed conditions of pulse width and temperature increase. The effects of heater size, pulse width and properties of substrate on the frequency have been correlated over wide ranges in terms of the dimensionless quantities governing the phenomenon. The simulated repetition frequency agrees with the results obtained from experiments both with and without boiling.

一种利用沸腾传播现象的微型泵已经研制成功。沸腾已被触发的薄膜加热器，这是在一个脉冲方式加热，通过产生一个蒸汽泡上的局部高热亚麻部分，和单向沸腾传播已经实现了整个加热器的长度。研究了沸腾传播的加热功率条件、传播形态、气泡尺寸和传播速度。在U形微通道中通过以高达20 Hz的频率重复的沸腾传播的连续泵送作用已经通过在通道的垂直截面中的液柱之间产生的压头差来证实。净流量也已被测量在高达40 Hz的频率，从位移的两个管水平地出售在相同的高度。泵在较高的频率将能够通过应用一个较小的加热器和/或选择基板的材料和成分，使得基板的温度增加将被抑制在脉冲加热的重复。从这个角度来看，最大频率的时间平均的加热器温度的增加可以保持低于允许的限制，在脉冲加热过程中，在微致动器使用快速沸腾的基础上预测的热传导从加热器到相邻材料的数值模拟。结果表明，在给定的脉冲宽度和温度升高条件下，随着加热器尺寸的减小，允许频率显著增加。加热器的大小，脉冲宽度和基板上的频率的性能的影响已在很宽的范围内的无量纲量控制的现象。模拟的重复频率与有无沸腾的实验结果一致。