Vibration Isolation Systems Using Zero-Power Magnetic Suspension

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(1)Design and Manufacture of a Three-Axis Vibration Isolation SystemA three-axis active vibration isolation system using zero-power magnetic suspension was manufactured. It has a circular isolation table and a circular middle table. The middle table is suspended by three pairs of spring and damper from the base. They are located at the vertices of an equilateral triangle. The isolation table is suspended by three hybrid magnets fixed to the middle table. Each hybrid magnet is aligned with a pair of spring and damper vertically.(2)Experimental Study on the Performances of the Three-Axis Vibration Isolation SystemThe zero-power control was implemented with a digital controller. The condition for the system to have infinite stiffness for direct disturbance was derived. This characteristic was confirmed experimentally.(3)Design and Manufacture of a Six-Axis Vibration Isolation SystemA six-axis active vibration isolation system using zero-power magnetic suspension was manufactured. To control the motions of the isolation table in the vertical directions, three differential suspension mechanisms, each of which consists of a mechanical spring and a hybrid magnetic suspension mechanism, were installed.(4)Experimental Study on the Performances of the Six-Axis Vibration Isolation SystemThe zero-power control was implemented with a digital controller. The characteristics of the developed vibration isolation system were studied experimentally.(5)Design and Manufacture of a Unit-type Vibration Isolation SystemA vibration isolation system, which was composed of vibration isolation units, was developed.(6)Experimental Study on the Performances of the Unit-type Vibration Isolation SystemThe zero-power control was implemented with a digital controller in a unit. Its performances were studied experimentally. A multi-axis vibration isolation system was realized by combining the units.