Active Vibration Isolation System Using Negative Stiffness

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(1) Nonlinear Compensation of Zero Power Magnetic Suspension for High-Performance Vibration Isolation SystemsOne of the problems of the vibration isolation system using zero-power magnetic suspension is that the amplitude of negative stiffness varies from the nominal value when disturabance force is applied to the isolation table. A nonlinear feedback control was applied to zero-power magnetic suspension to overcome this problem. The carried out experiment demonstrated the efficacy of this method.(2) Development of a Pneumatic Three-axis Vibration Isolation System Using Negative StiffnessA three-axis active vibration isolation system with pneumatic actuators for generating negative stiffness was developed. A control method of realizing a suspension with negative stiffness by the actuator was derived. It was demonstrated experimentally that the equalization of the amplitude of negative and positive stiffness enables the system to have zero compliance to direct disturbance.(3) Introduction of a Weight Support MechanismVibration isolation system using zero-power magnetic suspension was modified to be equipped with a weight support mechanism. The mechanism can reduce the static load force that the zero-power magnetic suspension has to support. Experimental study demonstrates that the modified system maintains infinite stiffness against direct disturbance even if such a weight support mechanism is added.(4) Six-Axis Vibration Isolation System Using Zero-Power Magnetic Suspension with a Weight Support MechanismA six-axis vibration isolation system was developed which uses zero-power control in combination with a passive weight support mechanism. The nonlinear compensation was also applied to widen the operation range. The performance of the controller was evaluated by conducting several experiments.