Study and prototype fabrication of out of plane microactuator

平面外微执行器的研究与原型制作

• 批准号: 13555073
• 负责人: HATA Seiichi
• 金额: $ 8.64万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555073/
• 关键词: MEMS; micromachining; thin film; amorphous; metallic glass; electrostatic actuator; information instruments; optical pickup; 光磁気ディスク; 情報機; 物性

1.PurposesIn order to make the new out of plane microactuator of thin film metallic glass, this research examined the following items.(1)Design of new out of plane microactuator.(2)Examination of fabrication method of the out of plane microactuator with precision 3D shape.(3)Displacement characteristics evaluation of the of the fabricated microactuator bearing the deployment to an optical pickup in mind.2.ResultsBased on microfabrication and microforming technology of thin film metallic glass, new out of plane microactuator (Micro Lens Actuator : MLA) is designed and fabricated. The measured performance of the MLA is as shown below. Figures in parentheses are specifications.(1)Stroke : 0.85 μm(1μm)(2)Driven object : Glass lens, Mass 0.89 mg, Diameter 1mm (Mass 0.89 mg, Diameter 1 mm)(3)Tilt error : 0.02° (less than 0.8°)(4)Resonance frequency : 3.54 kHz (more than 1 kHz)(5)Shock resistance : over 800G (no spec.)(6)Applied voltage : 50 V (no spec.)It becomes apparent that the MLA satisfies the specification except the stroke.3.Future worksIt is necessary to a conduct study of productivity and manufacturing process of commercial MLA for optical pickup of the next generation high record density MO drive system. Furthermore, an increase of a stroke and a decrease in drive voltage are aimed at.

1。目的是为了使薄膜金属玻璃的平面显微阳离器从平面的微型散热器中进行，这项研究检查了以下项目。（1）在平面显微耐药机中设计了新的新物品。（2）检查具有精确3D形状的平面微动仪的制造方法的检查。（3）供应次数的放置式供应。设计和制造的薄膜金属玻璃的微型制动和微型技术是从平面微型蒸馏器（微镜头执行器：MLA）的新型。 MLA的测量性能如下所示。括号中的数字是规格。（1）中风：0.85μm（1μm）（2）驱动的物体：玻璃镜头，质量为0.89 mg，直径为1mm（质量0.89 mg，直径1mm）（直径1mm）（3）倾斜误差：0.02°（0.02°（小于0.8°）（4）（4）（4）（3.54 khz）（比1 khz）（多于1 khz）（多于1 khz）（多于1 khz）（更多（无规格）（6）应用电压：50 V（无规格）很明显，MLA满足规范。3。Future WorksIT对于下一代高创纪录密度MO驱动系统的光学拾取的商业MLA的生产力和商业MLA的生产力和制造过程是必不可少的。此外，目标的增加和驱动电压的降低。

项目成果

Akira Shimokohbe: "Thin Film Metallic Glasses and Their Application"Abstract of The First International Forum at Honjo Campus, Akita Prefectural University. 13-20 (2001)

Akira Shimokohbe：“薄膜金属玻璃及其应用”秋田县立大学本庄校区第一届国际论坛摘要。

Seiichi Hata: "The trend on leading-edge of study and commercialization of micromachines (in Japanese) , Textbook of meeting in Yokohama City Center for Industrial Technology"(2002)

畑精一：《微型机械研究和商业化的前沿趋势（日语），横滨市工业技术中心会议教科书》（2002年）

S. HATA, Y. LIU, T. KATO and A. SHIMOKOHBE: "Three-Dimensional Micro-Forming Process of Thin Film Metallic Glass in the Supercooled Liquid Region"Proceedings of 10th International Conference on Precision Engineering(ICPE). 37-41 (2001)

S. HATA、Y. LIU、T. KATO 和 A. SHIMOKOHBE：“过冷液体区域薄膜金属玻璃的三维微成形过程”第十届国际精密工程会议（ICPE）论文集。

Y.LIU, S.HATA, K.WADA, A.SHIMOKOHBE: "Thermal, Mechanical and Electrical Properties of Pd-based Thin Film Metallic Glass"Jpn.J.Appl.Phys.. 40. 5382-5388 (2001)

Y.LIU、S.HATA、K.WADA、A.SHIMOKOHBE：“Pd 基薄膜金属玻璃的热、机械和电性能”Jpn.J.Appl.Phys.. 40. 5382-5388 (2001)

Seiichi Hata: "Micromachine, It's Amazing Technology (in Japanese) , Textbook of social education course in Meguro Ward"Meguro Ward. (2002)

畑诚一：《微型机器，神奇的技术（日语）》目黑区社会教育课程教科书《目黑区》。