Study and prototype fabrication of out of plane microactuator

点击翻译按钮获取中文摘要

1.PurposesIn order to make the new out of plane microactuator of thin film metallic glass, this research examined the following items.(1)Design of new out of plane microactuator.(2)Examination of fabrication method of the out of plane microactuator with precision 3D shape.(3)Displacement characteristics evaluation of the of the fabricated microactuator bearing the deployment to an optical pickup in mind.2.ResultsBased on microfabrication and microforming technology of thin film metallic glass, new out of plane microactuator (Micro Lens Actuator : MLA) is designed and fabricated. The measured performance of the MLA is as shown below. Figures in parentheses are specifications.(1)Stroke : 0.85 μm(1μm)(2)Driven object : Glass lens, Mass 0.89 mg, Diameter 1mm (Mass 0.89 mg, Diameter 1 mm)(3)Tilt error : 0.02° (less than 0.8°)(4)Resonance frequency : 3.54 kHz (more than 1 kHz)(5)Shock resistance : over 800G (no spec.)(6)Applied voltage : 50 V (no spec.)It becomes apparent that the MLA satisfies the specification except the stroke.3.Future worksIt is necessary to a conduct study of productivity and manufacturing process of commercial MLA for optical pickup of the next generation high record density MO drive system. Furthermore, an increase of a stroke and a decrease in drive voltage are aimed at.