System for 3D femtosecond laser-based micromachining

复杂玻璃和玻璃陶瓷的精密3D微加工是微系统技术的国际重要研究领域，也是图林根州的区域创新战略。应用领域从微传感器和致动器、光学和精密计量到生命科学、能量收集和量子技术。可重复和精确的玻璃微加工仍然是一个重大挑战，并且使用例如氟等离子体工艺进行。然而，通过这些方法在玻璃中创建3D结构目前只能在非常有限的程度上实现，并且不成比例地精细。因此，该应用旨在获得一种资源节约、无氟气体、高效的玻璃和玻璃陶瓷三维微加工系统。使用聚焦飞秒激光，可以在高度局部的区域修改玻璃。3D加工是通过在3D中引导激光聚焦来完成的，主要集中在所谓的“选择性激光（诱导）蚀刻”（SLE）和玻璃的密封焊接上。其次是局部折射率改变，选择性材料烧蚀（如金属薄膜）和双光子聚合（2PP）。这允许创建复杂和新颖的3D功能结构，这些结构无法用伊尔梅瑙工业大学现有的工艺生产，或者只能付出不成比例的高努力。最后但并非最不重要的是，该设施因此也允许设计和构建跨学科微系统的新方法，这值得探索。这种基于激光的3D微加工与基于等离子体的玻璃微结构、光结构玻璃和基于电子束的玻璃纳米结构领域的现有研究工作相结合，最近已申请专利，允许创新自由度，从而在伊尔梅瑙工业大学和微系统技术集团实施新型跨学科和合作研究项目。该设施将在微系统技术集团的洁净室实验室中运行，靠近微纳米技术中心（DFG核心设施），在受控的实验室环境中实施合作和跨学科研究工作，该实验室还提供所有外围技术。此外，保证与正在进行的研究课题无缝集成。当然，该设施将用于内部和外部研究合作。

The precise 3D micromachining of complex glasses and glass ceramics represents an internationally important research area for microsystems technology, but also for the state of Thuringia in terms of its regional innovation strategy. The field of application ranges from microsensors and actuators, optics and precision metrology to lifesciences, energy harvesting and quantum technologies. Reproducible and precise glass micromachining is still a major challenge and is carried out using, for example, fluorine plasma-based processes. However, the creation of 3D structures in glass by these methods is currently only possible to a very limited extent and is disproportionately elaborate. The application therefore aims to acquire a system for resource-saving, fluorine-gas-free and efficient 3D micromachining of glasses and glass ceramics. Using a focused femtosecond laser, glasses can be modified in a highly localized area. 3D processing is performed by guiding the laser focus in 3D, primarily focusing on so-called "selective laser(-induced) etching" (SLE) and hermetic welding of glasses. Secondary are local refractive index modifications, selective material ablation (e.g. metal thin films) and two-photon polymerization (2PP). This allows complex and novel 3D functional structures to be created, which cannot be produced with the processes currently available at the TU Ilmenau, or only with disproportionately high effort. Last but not least, the facility thus also permits new approaches in the design and construction of interdisciplinary microsystems, which are worth exploring. The combination of this laser-based 3D micromachining with the existing research work in the field of plasma-based glass microstructuring, photostructurable glasses and an electron beam-based glass nanostructuring, for which a patent has recently been filed, allows innovative degrees of freedom and thus the implementation of new types of interdisciplinary and cooperative research projects at the TU Ilmenau and the Microsystems Technology Group. The facility will be operated in the clean room laboratory of the Microsystems Technology Group in close proximity to the Center for Micro- and Nanotechnologies (DFG Core Facility) to implement cooperative and interdisciplinary research work in a controlled laboratory environment, which also provides all peripheral technologies. Furthermore, a seamless integration into the ongoing research topics is guaranteed. Of course, the facility will be available for in-house and also external research collaborations.