Ultimate high frequency nanoresonator for RF signal processing

用于射频信号处理的终极高频纳米谐振器

• 批准号: 15310101
• 负责人: COLLARD Dominique
• 金额: $ 10.24万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15310101/
• 关键词: micro resonator; radio frequency; micro; nano machining; capacitive coupling detection; tunneling current detection; resonance; electromechanical amplitude modulation; ナノ振動子; RFフィルター; 電子ビームリソグラフィー; マイクロアクチュエータ; トンネル電流

The aim of this research concerns the fabrication and characterization of high frequency nanoelectromechanical resonators (fundamental resonance frequency of which should be in the GHz range), using either the tunnel detection as the output transduction, or capacitive coupling detection. The first objective aimed at demonstrating the feasibility of a high frequency nanoelectromechanical resonator (fo>1 GHz). For this purpose, a resonator based on a blade geometry, and capacitive coupling detection, has been fabricated. A mixing-based measurement set-up has been performed in order to suppress parasitic feedthrough, and characterization of fundamental resonance and 2^<nd> mode at respectively 1.104 GHz and 2.5 GHz has been successfully demonstrated. In a second study, a multimode Atomic Force Microscope (AFM) operating in non-contact mode was used in order to extract the mechanical response of electrostatically actuated silicon bridge resonators (in the 10 MHz frequency range). This characterization method allowed to detect angstrom-scale vibration and the same experiments will be performed afterwards in Scanning Tunnel Microscope (STM) mode. The third part combined the two first approaches of the project and deals with the fabrication of RF nano-electromechanical resonators integrated with nano-positioning actuators for both excitation and tunnel detection and its characterisation in TEM chamber. Direct optical characterisation of the resonator mechanical response (f0=263kHz) has been validated, and static measurements of the resonator I(V) characteristics during the tunnel tip retraction sequence has been performed. The measurements in dynamic mode are currently investigated in order to demonstrate the modulation of the tunnel current around the resonance frequency of the resonator.

本研究的目的是制作和表征高频纳米机电谐振器(其基频应在GHz范围内)，使用隧道检测作为输出换能器，或使用电容耦合检测。第一个目标是论证高频纳米机电谐振器(fo&gt；1 GHz)的可行性。为此，制作了一种基于叶片几何形状和电容耦合检测的谐振器。为了抑制寄生馈通，建立了基于混频的测量装置，并成功地在1.104 GHz和2.5千兆赫处实现了基波共振和2^-nD&gt；模的特性。在第二项研究中，使用了工作在非接触模式下的多模原子力显微镜(AFM)，以提取静电驱动的硅桥谐振器(在10 MHz频率范围内)的机械响应。这种表征方法可以检测到埃尺度的振动，随后将在扫描隧道显微镜(STM)模式下进行相同的实验。第三部分结合本项目的前两种方法，研究了用于激励和隧道探测的集成了纳米定位驱动器的射频纳米机电谐振器的制备及其在瞬变电磁室中的特性。验证了谐振器机械响应(f0=263 kHz)的直接光学特性，并对隧道尖端回缩序列中的谐振器I(V)特性进行了静态测量。目前对动态模式下的测量进行了研究，以演示谐振器谐振频率周围的隧道电流的调制。

项目成果

K.KAKUSHIMA, H.FUJITA: "Micromachined Tools for Fabrication and Characterization in Nano Region"US-Japan Workshop on "Frontiers of Nanoscale Science and Technology. 86-87 (2003)

K.KAKUSHIMA、H.FUJITA：“纳米区域制造和表征的微机械工具”美日“纳米科学技术前沿”研讨会。86-87 (2003)

Fabrication and characterization of 1.1 GHz blade nano-electromechanical resonator

1.1 GHz 叶片纳米机电谐振器的制造和表征

• 发表时间: 2005
• 期刊: Applied Physics Letters Vol.86,No.21(論文番号)
• 作者: V.Agache;B.Legrand;D.Collard;H.Fujita;L.Buchaillot
• 通讯作者: L.Buchaillot

O.MILLET, P.BERNARDONI, S.REGNIER, P.BIDAUD, E.TSITSIRIS, D.COLLARD, L.BUCHAILLOT: "Electrostatic Actuated Micro Gripper Using An Amplification Mechanism"Sensors and Actuators. (In press).

O.MILLET、P.BERNARDONI、S.REGNIER、P.BIDAUD、E.TSITSIRIS、D.COLLARD、L.BUCHAILLOT：“使用放大机制的静电驱动微型夹具”传感器和执行器。

Y.CHO, T.KUKI, Y.FUKUTA, H.FUJITA, B.J.KIM: "Si-based micro probe card with sharp knife-edged tips combined metal deposition"Proc.of the 12^<th> Int.Conference on Solid-State Sensors, Actuators and Microsystems(Transducer'03), June 8-12, Boston, USA. 2E94

Y.CHO、T.KUKI、Y.FUKUTA、H.FUJITA、B.J.KIM：“带有锋利刀刃尖端的硅基微探针卡结合金属沉积”第 12 届国际固体会议论文集

Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in Non-Contact mode

使用原子力显微镜在非接触模式下表征静电驱动谐振器的垂直振动

• 发表时间: 2005
• 期刊: Transducers'05,Seoul,Korea,June 5-9,2005 Vol.1
• 作者: V.Agache;B.Legrand;K.nakamura;H.kawakatsu;L.Buchaillot;H.Toshiyoshi;D.Collard;H.Fujita
• 通讯作者: H.Fujita