Aspherical Mirror Polishing with Water and Excimer Laser
水和准分子激光非球面镜抛光
基本信息
- 批准号:15360034
- 负责人:
- 金额:$ 9.41万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for Scientific Research (B)
- 财政年份:2003
- 资助国家:日本
- 起止时间:2003 至 2004
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
To achieve highly precision polishing of any material or surface shape, the point contact polishing method with hydrofluoric acid produced by a light reaction has been developed : a convex teflon lens was put on the side ground in the presence of water, and a laser light was irradiated while rotating the teflon lens to induce a light reaction at the contact point of the sample surface, the teflon surface, and water, which produced the hydrofluoric acid. In order to carry it, silicone oil was used for bonding a fluoroplastic to a fused silica glass that composed the teflon lens, which is the first time in the world. The fluoroplastic surface was treated by plasma and had closer affinity with medicine temporarily, which was then exposed to ultraviolet rays to improve the adhesion strength. The surface modification efficiency, as a result, was increased by 1000 times or more. The ArF laser light was irradiated on the contact point of the teflon lens produced by the above method and the sample, and the face with 0.1 nm precision was yielded after polishing for ten minutes. This research of adhesion strength improvement took us time more than expected, and it will take us one or two more years to develop a polishing device and evaluate the capability the polished face in resisting laser damage.
为了实现任何材料或表面形状的高精度抛光,开发了用光反应产生的氢氟酸进行点接触抛光的方法:在有水的情况下,将凸起的聚四氟乙烯透镜放在侧面地面上,并在旋转聚四氟乙烯透镜的同时照射激光,在样品表面、聚四氟乙烯表面和水的接触点上诱导光反应,产生氢氟酸。为了携带它,硅油被用来将氟塑料粘合到组成特氟龙透镜的熔融石英玻璃上,这在世界上还是第一次。用等离子体对氟塑料表面进行处理,使其暂时与药物有更紧密的亲和力,然后将其暴露在紫外线下,以提高粘接强度。结果表明,表面改性效率提高了1000倍以上。用ArF激光照射上述方法制备的聚四氟乙烯透镜与样品的接触点,抛光10min后得到精度为0.1 nm的表面。这项提高结合力的研究花费了我们比预期更多的时间,我们还需要一到两年的时间来开发抛光装置,并评估抛光后的表面抵抗激光损伤的能力。
项目成果
期刊论文数量(46)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Photochemical Bonding of Fluorocarbon and Fused Silica Glass for Ultraviolet Ray Transmitting
氟碳与石英玻璃的紫外光透过光化学键合
- DOI:
- 发表时间:2004
- 期刊:
- 影响因子:0
- 作者:K.Asano;M.Murahara
- 通讯作者:M.Murahara
Selective Protein Adsorption on PTFE Surface with ArF Laser Induced Photochemical Modification
ArF 激光诱导光化学改性在 PTFE 表面选择性吸附蛋白质
- DOI:
- 发表时间:2004
- 期刊:
- 影响因子:0
- 作者:Y.Sato;M.Murahara
- 通讯作者:M.Murahara
Photochemical Bonding of Fluorocarbon and Fused Silica Glass for Ultraviolet Rav Transmitting
用于紫外 Rav 传输的氟碳与熔融石英玻璃的光化学键合
- DOI:
- 发表时间:2004
- 期刊:
- 影响因子:0
- 作者:K.Asano;M.Murahara
- 通讯作者:M.Murahara
H.Tokunaga, M.Murahara: "Single Shot of ArF Laser-Induced Photochemical Nucleation of Copper on Polyethylen-Terepthalate Surface"Materials Research Society Symposium Proceedings. 734. 443-448 (2003)
H.Tokunaga、M.Murahara:“ArF 激光诱导铜在聚对苯二甲酸乙二醇酯表面上的单次光化学成核”材料研究学会研讨会论文集。
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:
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MURAHARA Masataka其他文献
MURAHARA Masataka的其他文献
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{{ truncateString('MURAHARA Masataka', 18)}}的其他基金
High-strength room temperature adhesion of ultraviolet ray transmitting optical materials that have heat resistance to temperatures above 500 degrees centigrade.
耐热500℃以上的紫外线透过光学材料的高强度室温粘合。
- 批准号:
19360329 - 财政年份:2007
- 资助金额:
$ 9.41万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Development of Intractable Glaucoma Implant Device Using Excimer Laser
准分子激光难治性青光眼植入装置的研制
- 批准号:
11694316 - 财政年份:1999
- 资助金额:
$ 9.41万 - 项目类别:
Grant-in-Aid for Scientific Research (B).