Aspherical Mirror Polishing with Water and Excimer Laser

为了实现对任何材料或表面形状的高精度抛光，开发了使用通过光反应产生的氢氟酸的点接触抛光方法：在存在水的情况下，将凸的碲透镜放置在研磨的一侧，并且在旋转碲透镜的同时照射激光以在样品表面、碲表面和水的接触点处引起光反应，产生了氢氟酸为了携带它，硅油被用于将氟塑料粘合到组成TEMPERATURE透镜的熔融石英玻璃上，这在世界上尚属首次。采用等离子体处理氟塑料表面，使其暂时与药物有较好的亲和性，再经紫外线照射，以提高氟塑料表面与药物的粘附强度。结果，表面改性效率提高了1000倍或更多。对通过上述方法制造的碲透镜与样品的接触点照射ArF激光，研磨10分钟后，得到精度为0.1nm的面。这项提高附着强度的研究比我们预期的要花更多的时间，我们还需要一两年的时间来开发抛光设备和评估抛光面抵抗激光损伤的能力。

To achieve highly precision polishing of any material or surface shape, the point contact polishing method with hydrofluoric acid produced by a light reaction has been developed : a convex teflon lens was put on the side ground in the presence of water, and a laser light was irradiated while rotating the teflon lens to induce a light reaction at the contact point of the sample surface, the teflon surface, and water, which produced the hydrofluoric acid. In order to carry it, silicone oil was used for bonding a fluoroplastic to a fused silica glass that composed the teflon lens, which is the first time in the world. The fluoroplastic surface was treated by plasma and had closer affinity with medicine temporarily, which was then exposed to ultraviolet rays to improve the adhesion strength. The surface modification efficiency, as a result, was increased by 1000 times or more. The ArF laser light was irradiated on the contact point of the teflon lens produced by the above method and the sample, and the face with 0.1 nm precision was yielded after polishing for ten minutes. This research of adhesion strength improvement took us time more than expected, and it will take us one or two more years to develop a polishing device and evaluate the capability the polished face in resisting laser damage.