Aspherical Mirror Polishing with Water and Excimer Laser

为了实现对任何材料或表面形状的高精度抛光，开发了光反应产生氢氟酸的点接触抛光方法：在存在水的侧地面上放置一个凸聚四氟乙烯透镜，在旋转聚四氟乙烯透镜的同时照射激光，在样品表面、聚四氟乙烯表面和水的接触点诱导光反应，从而产生氢氟酸。为了携带它，在世界上首次使用硅油将氟塑料粘接在熔融石英玻璃上，制成了聚四氟乙烯透镜。氟塑料表面经等离子体处理后，暂时与药物有更紧密的亲和力，再经紫外线照射，提高附着强度。结果，表面改性效率提高了1000倍以上。将ArF激光照射在上述方法生产的聚四氟乙烯透镜与样品的接触点上，抛光10分钟后得到精度为0.1 nm的表面。这项提高附着强度的研究花费了我们比预期更多的时间，我们将需要一到两年的时间来开发抛光装置并评估抛光表面抵抗激光损伤的能力。

To achieve highly precision polishing of any material or surface shape, the point contact polishing method with hydrofluoric acid produced by a light reaction has been developed : a convex teflon lens was put on the side ground in the presence of water, and a laser light was irradiated while rotating the teflon lens to induce a light reaction at the contact point of the sample surface, the teflon surface, and water, which produced the hydrofluoric acid. In order to carry it, silicone oil was used for bonding a fluoroplastic to a fused silica glass that composed the teflon lens, which is the first time in the world. The fluoroplastic surface was treated by plasma and had closer affinity with medicine temporarily, which was then exposed to ultraviolet rays to improve the adhesion strength. The surface modification efficiency, as a result, was increased by 1000 times or more. The ArF laser light was irradiated on the contact point of the teflon lens produced by the above method and the sample, and the face with 0.1 nm precision was yielded after polishing for ten minutes. This research of adhesion strength improvement took us time more than expected, and it will take us one or two more years to develop a polishing device and evaluate the capability the polished face in resisting laser damage.