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Multi-dimensional Nano Control of Plasma Flow Systems by Using Fusion

利用融合对等离子体流系统进行多维纳米控制

基本信息

批准号：
15360090
负责人：
NISHIYAMA Hideya
金额：
$ 8.32万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15360090/
关键词：
Plasma flow Functional fluids Multidimensional control Nano flow Complex interactions Micro nano particle Virtual experiment Integrated fusion

项目摘要

‘Plasma Flow Integrated System' is successfully constructed by combining plasma flow with micor/nano particles, radicals and interface with complex interactions and further by integrating with senser and controller. The results obtained in the present study are as follows.(1)The effects of inlet flow rate ratios, swirling flow, gas injection location on needed input power for stable plasma generation and injected reactant gas flow rate are clarified for DC-RF hybrid plasma flow system. Furthermore, the effect of operating pressure on the in-flight characteristics and flow structure is clarified to provide the important element for multi-dimensional control.(2)Based on the statistically optimized DC-RF hybrid plasma flow system for photo-catalytic nano particle synthesis, particle size distribution and crystal structure can be controlled by inlet gas flow rate ratio and quench gas flow rate.(3)Multi-dimensional intelligent control system is developed to stabilize the argon/nitrogen plasma jet impinging onto the substrate for nitridation. Constant control of radiation intensity near substrate and suppression of plasma jet fluctuation are realized by operating back pressure and applied magnetic field.(4)The effects of seeding, applied frequency and trubulent characteristics on phase change and diameter decrease of micro particles are numerically clarified to control particle treatment by ICP with seeding potassium vapor.(5)The effects of quench gas flow rate, applied frequency and DC jet addition on nano particle size distribution for ICP are numerically clarified by realistic nano-particle synthesis model.

通过将等离子体流与微米/纳米粒子、自由基和具有复杂相互作用的界面相结合，并通过与传感器和控制器的集成，成功地构建了等离子体流集成系统。主要研究结果如下：(1)研究了直流-射频混合等离子体系统中，进口流量比、旋流流量、气体注入位置对稳定等离子体产生所需输入功率和注入反应物气体流量的影响。基于基于统计优化的DC-RF混合等离子体光催化合成纳米粒子系统，可以通过入口气体流量比和激冷气体流量来控制粒子的粒度分布和晶体结构。(3)开发了多维智能控制系统，稳定了撞击在衬底上进行氮化的Ar/N等离子体射流。通过操作背压和外加磁场，实现对衬底附近辐射强度的恒定控制和对等离子体射流波动的抑制。(4)通过数值模拟阐明了晶种、外加频率和激振特性对微粒相变和直径减小的影响，以控制含钾蒸气的等离子体处理。(5)通过实际的纳米粒子合成模型，数值阐明了激冷气体流量、外加频率和直流射流加入量对纳米粒子尺寸分布的影响。