Multi-dimensional Nano Control of Plasma Flow Systems by Using Fusion

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‘Plasma Flow Integrated System' is successfully constructed by combining plasma flow with micor/nano particles, radicals and interface with complex interactions and further by integrating with senser and controller. The results obtained in the present study are as follows.(1)The effects of inlet flow rate ratios, swirling flow, gas injection location on needed input power for stable plasma generation and injected reactant gas flow rate are clarified for DC-RF hybrid plasma flow system. Furthermore, the effect of operating pressure on the in-flight characteristics and flow structure is clarified to provide the important element for multi-dimensional control.(2)Based on the statistically optimized DC-RF hybrid plasma flow system for photo-catalytic nano particle synthesis, particle size distribution and crystal structure can be controlled by inlet gas flow rate ratio and quench gas flow rate.(3)Multi-dimensional intelligent control system is developed to stabilize the argon/nitrogen plasma jet impinging onto the substrate for nitridation. Constant control of radiation intensity near substrate and suppression of plasma jet fluctuation are realized by operating back pressure and applied magnetic field.(4)The effects of seeding, applied frequency and trubulent characteristics on phase change and diameter decrease of micro particles are numerically clarified to control particle treatment by ICP with seeding potassium vapor.(5)The effects of quench gas flow rate, applied frequency and DC jet addition on nano particle size distribution for ICP are numerically clarified by realistic nano-particle synthesis model.