Development of Cavitation Aided Ultra-precision Surface Finishing Technique of 3-dimentional Curved hole

在这项研究中，提出了一种基于吸气流中气蚀作用来解决加工现象的新概念，提出了气蚀辅助加工作为一种精密微细加工方法。自发现流体机械以来，一直存在空化问题，导致流体机械的磨损、振动和噪音。然而，空化辅助加工在清洗或喷丸等方面的优势最近被报道。空化辅助加工使混合在水的加工液中的疏松的微小磨粒干扰加工液的空化和流动的冲击，部分地受到设置在加工点上方的限制器的限制。通过沿平行于工件表面的流动方向滑动限制器，沿着工件表面连续发生加工现象。在微图案化过程中，除所需加工区域外的抛光玻璃表面用聚酯膜遮盖，并利用空化辅助加工进行加工。释放掩膜后，玻璃表面获得了所需的微观轮廓。本文研究了利用该微图案化方法制备的玻璃微轮廓的产生机理和特征。随着掩膜厚度的减小或掩模确定的加工宽度的减小，产生的微图形的成形精度变得更高。利用掩模图形在玻璃表面形成了微梯形凹槽、微梯形凹陷等微图形，为空化辅助加工应用于硬脆材料的微细加工提供了可能性。

In this study, the cavitation aided machining is proposed as a precision micro patterning method based on the new concept of a positive use of cavitation in a suction flow for machining phenomenon. There have been problems on cavitation that causes erosion, vibration and noise of fluid machinery since its discovery. However, its advantages on cleaning or peening and so on were recently reported.The cavitation aided machining makes loose micro abrasive grains, which are mixed in machining fluid of water, to interfere in the workpiece surface with impact of cavitation and flow of machining fluid restricted partially by the restrictor setting above a machining point on workpiece surface. The machining phenomenon continuously occurs along the workpiece surface by sliding a restrictor along the flowing direction parallel to the workpiece surface. In the micro patterning process, the polished glass surface except for the required machining region is masked by polyester film, and it is machined by the cavitation aided machining. The required micro profile on glass surface is obtained after releasing masking film.The micro profile generation mechanism and characteristics of glass by the proposed micro patterning method has been investigated in this study. The form accuracy of generated micro patterns become higher with decreasing the thickness of masking film or the machining width determined by the mask. Several micro patterns on glass surface, for example the micro terraced groove, the micro terraced dimple and so on, depend on mask patterns have been obtained, and there is a possibility of cavitation aided machining applying to the micro fabrication of hard and brittle materials.