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Development of Cavitation Aided Ultra-precision Surface Finishing Technique of 3-dimentional Curved hole

三维曲孔空化辅助超精密表面精加工技术开发

基本信息

批准号：
15560097
负责人：
OHASHI Kazuhito
金额：
$ 2.18万
依托单位：
Okayama University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

项目摘要

In this study, the cavitation aided machining is proposed as a precision micro patterning method based on the new concept of a positive use of cavitation in a suction flow for machining phenomenon. There have been problems on cavitation that causes erosion, vibration and noise of fluid machinery since its discovery. However, its advantages on cleaning or peening and so on were recently reported.The cavitation aided machining makes loose micro abrasive grains, which are mixed in machining fluid of water, to interfere in the workpiece surface with impact of cavitation and flow of machining fluid restricted partially by the restrictor setting above a machining point on workpiece surface. The machining phenomenon continuously occurs along the workpiece surface by sliding a restrictor along the flowing direction parallel to the workpiece surface. In the micro patterning process, the polished glass surface except for the required machining region is masked by polyester film, and it is machined by the cavitation aided machining. The required micro profile on glass surface is obtained after releasing masking film.The micro profile generation mechanism and characteristics of glass by the proposed micro patterning method has been investigated in this study. The form accuracy of generated micro patterns become higher with decreasing the thickness of masking film or the machining width determined by the mask. Several micro patterns on glass surface, for example the micro terraced groove, the micro terraced dimple and so on, depend on mask patterns have been obtained, and there is a possibility of cavitation aided machining applying to the micro fabrication of hard and brittle materials.

在这项研究中，基于在吸流中积极利用空化现象进行加工现象的新概念，提出了空化辅助加工作为一种精密微图案化方法。自发现以来，空化现象一直存在导致流体机械腐蚀、振动和噪声的问题。然而，最近报道了其在清洁或喷丸等方面的优点。空化辅助加工使混合在水加工液中的松散的微小磨粒干扰工件表面，空化的影响和加工液的流动受到工件表面加工点上方设置的限流器的部分限制。通过沿着平行于工件表面的流动方向滑动限流器，加工现象沿着工件表面连续发生。在微图案加工过程中，抛光后的玻璃表面除所需加工区域外均用聚酯薄膜遮盖，并通过空化辅助加工进行加工。释放掩模膜后，在玻璃表面获得所需的微轮廓。本研究研究了所提出的微图案化方法的玻璃微轮廓的生成机制和特性。随着掩模膜厚度或掩模确定的加工宽度的减小，生成的微图案的形状精度变得更高。已经获得了依赖于掩模图案的玻璃表面的微梯形凹槽、微梯形凹坑等多种微细图案，空化辅助加工在硬脆材料的微细加工中具有应用的可能性。

项目成果

期刊论文数量（12）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Kazuhito Ohashi: "Development of Cavitation Aided Machining for Finishing Fine Surface"Proceedings of The Eighteenth Annual ASPE Meeting. 1-4 (2003)

Kazuhito Ohashi：“用于精加工精细表面的空化辅助加工的开发”第十八届 ASPE 年度会议记录。

DOI：
发表时间：
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影响因子：
0
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大橋一仁: "キャビテーション援用加工による水晶の精密加工"2003年度精密工学会中国四国支部岡山地方学術講演会講演論文集. 1-2 (2003)

Kazuhito Ohashi：“通过空化辅助加工对晶体进行精密加工”日本精密工程学会中国四国分会 2003 年冈山地区学术会议论文集 1-2 (2003)。

DOI：
发表时间：
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影响因子：
0
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Minimizing Process of Surface Roughness in Grinding with Super-soft Grade Resinoid Wheel

超软级树脂砂轮磨削表面粗糙度最小化工艺

DOI：
发表时间：
2004
期刊：
Proceedings of The 7th International Conference on Progress of Machining Technology
影响因子：
0
作者：
大橋一仁;K.Ohashi;大橋一仁;K.Ohashi
通讯作者：
K.Ohashi

Cavitation Aided Micro Machining

空化辅助微加工