Development of an aspherical shape measurement system for on-machine

机上非球面形状测量系统的开发

• 批准号: 15560099
• 负责人: NOMURA Takashi
• 金额: $ 1.92万
• 依托单位: Toyama Prefectural University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15560099/
• 关键词: Aspherical; Shape measurement; On-machine; Shearing interferometer; Zone plate

To measure an aspherical surface processed by an ultra precision lath, an on-machine measurement system was developed as follows:1)Shearing interferometer : A shearing interferometer was developed to measure the asperical surface on the ultra precision lath just after the processing. Because a part of an interferogram was covered with a tool post, the intensity of the interferogram acquired by a line CCD camera was analyzed. And a zone plate was used to generate the aspherical wave front.2)Software : Software was developed to analyze the interferograms. The interferograms were obtained every time that the measured surface was turned fixed angle. Therefore, each interferogram was analyzed to obtained a line shape passing through the turning center and the line shapes were assembled to construct aspherical surface. And an algorism was developed to fit a curve into measured shape.3)Experiment and results : A spherical mirror with shape error in center point was measured to estimate an ability of developed system. The result obtained by developed system agree well with the result obtained by Fizeau interferometer.4)Proposal of new principle : A method of measurement using many sphere wave fronts with various curvatures was proposed to measure these aspherical surfaces. Validity of proposed method was confirmed by simulations and experiments.

为了测量超精密车床加工的非球面表面，研制了一套在机测量系统：1)剪切干涉仪：研制了剪切干涉仪，用于测量超精密车床加工后的非球面表面。由于干涉图的一部分被刀杆覆盖，分析了线阵CCD相机获取的干涉图的强度。并用波带片产生非球面波前。软件：开发了干涉图分析软件。每转动一次被测表面，即可得到干涉图。因此，对每个干涉图进行分析，得到通过车削中心的线形，并将这些线形组装成非球面。3)实验与结果：对中心点形状误差较大的球面反射镜进行了测量，以评价所研制系统的性能。4)新原理的提出：提出了一种利用多个不同曲率的球面波前测量非球面的方法。通过仿真和实验验证了该方法的有效性。

项目成果

有限長データ用ローパスフィルタの研究(第2報)

有限长度数据低通滤波器的研究（第二次报告）

• 发表时间: 2006
• 期刊: 精密工学会誌 72・5
• 作者: 沼田宗敏;野村俊;神谷和秀;田代発造;輿水大和
• 通讯作者: 輿水大和

Hiroyasu Koshimizu, Filter with variable transmission characteristics for determination of three-dimensional roughbness

Hiroyasu Koshimizu，具有可变传输特性的滤波器，用于测定三维粗糙度

• 发表时间: 2006
• 期刊: Precision Engineering Vol.30
• 作者: Munetoshi Numada;Takashi Nomura;Kazuhide Kamiya;Hatsuzo Tashiro
• 通讯作者: Hatsuzo Tashiro

うねり曲線を抽出するローパスフィルタの研究

波纹度曲线提取低通滤波器的研究

• 发表时间: 2005
• 期刊: 精密工学会誌 71・2
• 作者: 沼田宗敏;野村俊;神谷和秀;田代発造;輿水大和
• 通讯作者: 輿水大和

うねり曲線を抽出するローパスフィルタの研究(第3報)

提取波纹度曲线的低通滤波器研究（第三次报告）

• 发表时间: 2005
• 期刊: 精密工学会誌 71・9
• 作者: 沼田宗敏;野村俊;神谷和秀;田代発造;輿水大和
• 通讯作者: 輿水大和

A Study on Low-Pass Filter for Extracting Waviness Profile (3^<rd> Report)

用于提取波纹度轮廓的低通滤波器的研究（第3^<rd>报告）

• 发表时间: 2005
• 期刊: Journal of the Japan Society for Precision Engineering Vol.71
• 作者: Munetoshi Numada;Takashi Nomura;Kazuhide Kamiya;Hatsuzo Tashiro;Hiroyasu Koshimizu
• 通讯作者: Hiroyasu Koshimizu