STUDY OF SHAPE MEASUREMENTS ON AN ULTRA PRESICION LATHE BY USING A LATERAL SHEARING INTERFEROMETER

使用横向剪切干涉仪在超精密车床上测量形状的研究

• 批准号: 10650119
• 负责人: NOMURA Takashi
• 金额: $ 2.37万
• 依托单位: TOYAMA PREFECTURAL UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10650119/
• 关键词: LATERAL SHEARING INTERFEROMETER; ON-MACHEINE SHAPE MEASUREMENT; ULTRA PRESICION LATHE; ラテラルシアリング干渉計; 回折格子; レーザ描画装置

1) A systematic error caused by changing of a shear amount was clarified in the integration method with respect to analysis of a lateral shearing interferogram. A analyzing method combined the integration method with the polynomial method was proposed to remove the error.2) A program was developed to remove a systematic error in the optical system of the interferometer.3) An error is caused, when a lateral shearing interferogram of a work piece with a periodic aberration is analyzed. The analyzing error was clarified.4) A lateral shearing interferometer was deigned and manufactured. By the interferometer, shape measurements were performed on the lathe.5) A compact lateral shearing interferometer was deigned and manufactured. The interferometer can be set on the lathe without remove the toll post of the lathe.

1）在整合方法中阐明了剪切量引起的系统误差，以分析横向剪切干涉图。提出了一种与多项式方法结合的分析方法，以消除误差。2）开发了一个程序来删除干涉仪的光学系统中的系统误差。3）当对工作片的横向剪切干扰部的横向剪切干涉使用周期性畸变分析。阐明了分析误差。4）横向剪切干涉仪被神经和制造。通过干涉仪，在车床上进行了形状测量。5）紧凑的侧面剪切干涉仪被去签名和制造。干涉仪可以在车床上设置，而无需删除车床的通行费。

项目成果

S.Okuda, T.Nomura, et al: "A Method of Analyzing a Lateralshearing Interferogram to Measure Whole Surface Undertest"1st International Euspen Conference. 2. 149-152 (1999)

S.Okuda、T.Nomura 等人：“分析横向剪切干涉图以测量整个表面测试的方法”第一届国际 Euspen 会议。

S.Okuda, T.Nomura, et al: "Improvement of Precision in analysis of Lateral Shearing Interferogiam Using Integration"1999 International Conference on Optical Engineering for Sensing and Nanotechnology. 630-633 (1999)

S.Okuda、T.Nomura 等人：“利用积分提高横向剪切干涉分析的精度”1999 年传感和纳米技术光学工程国际会议。

Takashi Nomura, Kazuhide Kamiya, Hiroshi Miyashiro, Seiichi Okuda, Hatsuzo Tashiro, and Kazuo Yoshikawa: "Shape Measurements of Mirror Surfaces with a Lateral Shearing Interferometer During Machine Running"Precision Engineering. Vol.22, No.4. 185-189 (199

Takashi Nomura、Kazuhide Kamiya、Hiroshi Miyashiro、Seiichi Okuda、Hatsuzo Tashiro 和 Kazuo Yoshikawa：“机器运行期间使用横向剪切干涉仪进行镜面形状测量”精密工程。

T.Nomura, K.Kamiya, et al.: "Shape measurements of Mirror Surfaces with a Lateral shearing Interferometer During Machine Running"Precision Engineering. 22. 185-189 (1998)

T.Nomura、K.Kamiya 等人：“机器运行期间使用横向剪切干涉仪对镜面进行形状测量”精密工程。

Seiichi Okuda, Takashi Nomura, Kazuhide Kamiya, Hiroshi Miyashiro, Hatsuzo Tashiro, and Kazuo Yoshikawa: "A Method of Analyzing a Lateral Shearing Interferogram to Measure Whole Surface Under Test, 1st International Euspen Conference"Vol.2. 149-152 (1999)

Seiichi Okuda、Takashi Nomura、Kazuhide Kamiya、Hiroshi Miyashiro、Hatsuzo Tashiro 和 Kazuo Yoshikawa：“分析横向剪切干涉图以测量被测整个表面的方法，第一届国际 Euspen 会议”第 2 卷。