STUDY OF SHAPE MEASUREMENTS ON AN ULTRA PRESICION LATHE BY USING A LATERAL SHEARING INTERFEROMETER

使用横向剪切干涉仪在超精密车床上测量形状的研究

• 批准号: 10650119
• 负责人: NOMURA Takashi
• 金额: $ 2.37万
• 依托单位: TOYAMA PREFECTURAL UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10650119/
• 关键词: LATERAL SHEARING INTERFEROMETER; ON-MACHEINE SHAPE MEASUREMENT; ULTRA PRESICION LATHE; ラテラルシアリング干渉計; 回折格子; レーザ描画装置

1) A systematic error caused by changing of a shear amount was clarified in the integration method with respect to analysis of a lateral shearing interferogram. A analyzing method combined the integration method with the polynomial method was proposed to remove the error.2) A program was developed to remove a systematic error in the optical system of the interferometer.3) An error is caused, when a lateral shearing interferogram of a work piece with a periodic aberration is analyzed. The analyzing error was clarified.4) A lateral shearing interferometer was deigned and manufactured. By the interferometer, shape measurements were performed on the lathe.5) A compact lateral shearing interferometer was deigned and manufactured. The interferometer can be set on the lathe without remove the toll post of the lathe.

1)阐明了在横向剪切干涉图分析的积分法中，由于剪切量的变化而引起的系统误差。提出了一种积分法与多项式法相结合的分析方法来消除误差; 2）开发了消除干涉仪光学系统中系统误差的程序; 3）分析了周期性畸变工件的横向剪切干涉图时产生的误差。设计并制作了横向剪切干涉仪。利用该干涉仪在车床上进行了板形测量。5）设计并制作了一台小型的横向剪切干涉仪。该干涉仪可安装在车床上，而不需要拆除车床的立柱。

项目成果

S.Okuda, T.Nomura, et al: "A Method of Analyzing a Lateralshearing Interferogram to Measure Whole Surface Undertest"1st International Euspen Conference. 2. 149-152 (1999)

S.Okuda、T.Nomura 等人：“分析横向剪切干涉图以测量整个表面测试的方法”第一届国际 Euspen 会议。

S.Okuda, T.Nomura, et al: "Improvement of Precision in analysis of Lateral Shearing Interferogiam Using Integration"1999 International Conference on Optical Engineering for Sensing and Nanotechnology. 630-633 (1999)

S.Okuda、T.Nomura 等人：“利用积分提高横向剪切干涉分析的精度”1999 年传感和纳米技术光学工程国际会议。

T.Nomura, K.Kamiya, et al.: "Shape measurements of Mirror Surfaces with a Lateral shearing Interferometer During Machine Running"Precision Engineering. 22. 185-189 (1998)

T.Nomura、K.Kamiya 等人：“机器运行期间使用横向剪切干涉仪对镜面进行形状测量”精密工程。

Takashi Nomura, Kazuhide Kamiya, Hiroshi Miyashiro, Seiichi Okuda, Hatsuzo Tashiro, and Kazuo Yoshikawa: "Shape Measurements of Mirror Surfaces with a Lateral Shearing Interferometer During Machine Running"Precision Engineering. Vol.22, No.4. 185-189 (199

Takashi Nomura、Kazuhide Kamiya、Hiroshi Miyashiro、Seiichi Okuda、Hatsuzo Tashiro 和 Kazuo Yoshikawa：“机器运行期间使用横向剪切干涉仪进行镜面形状测量”精密工程。

S.Okuda, T.Nomura, et al: "High Precision Analysis of Lateral Shearing Interferogiam Using the Integration Method and Polynomials"Applied Optics. 39. 5179-5186 (2000)

S.Okuda、T.Nomura 等人：“使用积分方法和多项式对横向剪切干涉进行高精度分析”应用光学。