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Fabrication of Bismuth Thin Films Nano-Hall Sensors for Room Temperature Scanning Micro-Hall Probe Microscope Imaging of Ferromagnetic Microstructures

用于铁磁微结构室温扫描微霍尔探针显微镜成像的铋薄膜纳米霍尔传感器的制造

基本信息

批准号：
15560271
负责人：
SANDHU Adarsh
金额：
$ 2.37万
依托单位：
TOKYO INSTITUTE OF TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

项目摘要

A fundamental understanding of the behavior of magnetic domains in external magnetic fields is important for the development of information technology such as ultra-high density magnetic recording media, high coercivity permanent magnets and multilayered ferromagnetic structures used for fabricating novel ‘spintronic'' devices. We have developed a room temperature scanning Hall probe microscopy (RT-SHPM) for the non-invasive and quantitative imaging of localized stray fields at the surfaces of ferromagnetic magnetic microstructures in the presence of pulsed external magnetic fields of 3 T Oe. However, advances in magnetic recording media have led to increasing demands for improvements in the spatial resolution of SHPM which using semiconducting GaAs/AlGaAs micro-Hall sensors is limited to 1.0 x 1.0μm due to surface depletion effects.The use of bismuth (Bi)(a semimetal, which exhibits a large Hall coefficient and negligible surface depletion) for fabrication of submicron Hall sensors sh … More ows promise as a means of improving the spatial resolution of RT-SHPM technology. Conventional MFM systems have a spatial resolution of 〜100nm, a figure which serves as a benchmark and target for studies on spatial resolution.In this research we succeeded in fabricating 50nm x 50nm Hall sensors using Bi thin films deposited by thermal evaporation. The electrical properties of the films were improved by post-deposition annealing in vacuum. The nano-Hall sensors were successfully used for magnetic imaging the surface of crystalline garnet thin films.This report describes the research carried out on "Fabrication of Bismuth Thin Films Nano-Hall Sensors for Room Temperature Scanning Micro-Hall Probe Microscope Imaging of Ferromagnetic Microstructures" as part of the Grant-in-Aid for Scientific Research (c)(2)for two years between 2003 and 2004. The fabrication and electrical characteristics of the Bi nano-Hall sensors are described. Also, the use of the Bi-nanosensors for imaging garnet thin films is demonstrated. Less

对磁畴在外部磁场中的行为的基本理解对于信息技术的发展是重要的，例如超高密度磁记录介质、高矫顽力永磁体和用于制造新型“自旋电子”器件的多层铁磁结构。我们已经开发了一种室温扫描霍尔探针显微镜（RT-SHPM），用于在3 T Oe的脉冲外磁场存在下对铁磁微结构表面的局部杂散场进行非侵入性和定量成像。然而，磁记录介质的进步导致了对SHPM的空间分辨率的改进的日益增长的需求，由于表面耗尽效应，霍尔传感器的尺寸被限制在1.0 × 1.0μm。采用铋（Bi）（一种半金属，具有大的霍尔系数和可忽略的表面耗尽）制作亚微米霍尔传感器，可使霍尔传感器的尺寸达到1.0 × 1.0μm。 ...更多信息作为提高RT-SHPM技术空间分辨率的一种手段，传统的MFM系统的空间分辨率为100 nm，这是空间分辨率研究的基准和目标。薄膜的电学性能通过沉积后的真空退火得到改善。纳米霍尔传感器已成功用于结晶石榴石薄膜表面的磁性成像。本报告介绍了在2003年至2004年两年期间，作为科学研究资助计划（c）（2）的一部分，进行的“用于铁磁微结构的室温扫描微霍尔探针显微镜成像的铋薄膜纳米霍尔传感器的制造”研究。介绍了Bi纳米霍尔传感器的制作工艺和电学特性。此外，还演示了使用双纳米传感器对石榴子石薄膜进行成像。少

项目成果

期刊论文数量（36）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

High Sensitivity InSb Ultra-Thin Film Micro-Hall Sensors for Bioscreening Applications

DOI：
10.1143/jjap.43.l868
发表时间：
2004-06
期刊：
Japanese Journal of Applied Physics
影响因子：
1.5
作者：
A. Sandhu;H. Sanbonsugi;I. Shibasaki;M. Abe;H. Handa
通讯作者：
A. Sandhu;H. Sanbonsugi;I. Shibasaki;M. Abe;H. Handa

A.Sandhu et al.: "Nano and micro Hall-effect sensors for room-temperature scanning hall probe microscopy"Microelectronic Engineering. (accepted for publication). (2004)

A.Sandhu 等人：“用于室温扫描霍尔探针显微镜的纳米和微型霍尔效应传感器”微电子工程。

DOI：
发表时间：
期刊：
影响因子：
0
作者：
通讯作者：

Nano and micro Hall-effect sensors for room-temperature scanning hall probe microscopy

DOI：
10.1016/j.mee.2004.03.029
发表时间：
2004-06
期刊：
Microelectronic Engineering
影响因子：
2.3
作者：
A. Sandhu;A. Okamoto;I. Shibasaki;A. Oral
通讯作者：
A. Sandhu;A. Okamoto;I. Shibasaki;A. Oral

50 nm Hall sensors for room temperature scanning Hall probe microscopy

DOI：
10.1143/jjap.43.777
发表时间：
2004-02-01
期刊：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
影响因子：
0
作者：
Sandhu, A;Kurosawa, K;Oral, A
通讯作者：
Oral, A

Micro-Hall Devices for Scanning Hall Probe Microscopy

用于扫描霍尔探针显微镜的微霍尔器件