Glovebox-integrated evaporation system

可以佩戴在皮肤上的软测量系统为连续和方便的健康监测提供了全新的可能性。例如，文献中已经证明了一种带有无线电链接的传感器“贴片”，用于记录心电图(EKG)。在进一步的步骤中，可以实现软测量植入物--可能还具有活性药物释放--这也为人体提供了全新的形状和功能可能性。如今，光学测量方法在成像和生物医学分子诊断系统中以各种方式使用。为了能够将吸收测量技术或荧光测量技术等测量方法集成到新型软测量系统中，除了无机半导体材料之外，还需要新的材料类别和用于在软衬底上进行单片集成的新工艺。基于有机半导体材料的光电子元件可以在大量的衬底上加工，并且可以利用有机化学的原理来定制光学性质。因此，有机发光二极管(OLED)和有机光电探测器(OPD)是非常有前途的新型软、可弯曲和可伸展的传感器系统。在基尔大学集成系统和光子学教席，有机光电元件-有机发光二极管(OLED)和有机光电探测器(OPD)-在柔性、柔性、可伸缩和小型化的传感器系统中用于光学读出单元的研究。基于我们自己在小型化传感器系统和有机光电子学方面的广泛前期工作，这里申请的手套盒集成蒸发系统将用于研究基于OLED-OPD的可弯曲、可伸展和柔软衬底的光学测量系统。到目前为止，椅子上只有2009年的简单镀膜系统。这只在基板前面提供了快门，在源上方没有快门，并且没有自动配方控制操作和掩模改变。这意味着在不从系统中移除样本的情况下，不可能发生参数变化。因此，迫切需要购置一种新的高真空蒸发系统，以确保研究的成功。液态加工步骤以及最终的表征和封装应在氮气气氛中的手套盒中进行。为此，手套盒必须与蒸发系统集成在一起。

Soft sensor systems that can be worn on the skin offer completely new possibilities for continuous and convenient health monitoring. For example, a sensor “patch” with radio link for recording an electrocardiogram (EKG) has been demonstrated in the literature. In a further step, soft sensor implants - possibly also with an active drug release - can be realized, which also offer completely new shape and functional possibilities in the body. Optical measurement methods are nowadays used in a variety of ways both in imaging and in biomedical molecular diagnostic systems. In order to be able to integrate measurement methods such as absorption measurement technology or fluorescence measurement technology into new types of soft sensor systems, new material classes in addition to inorganic semiconductor materials and new processes for monolithic integration on soft substrates are necessary. Optoelectronic components based on organic semiconductor materials can be processed on a large number of substrates and the optical properties can be tailored using the principles of organic chemistry. Organic light-emitting diodes (OLEDs) and organic photodetectors (OPDs) are therefore very promising for new types of soft, bendable and stretchable sensor systems.At the Chair for Integrated Systems and Photonics Kiel University, organic optoelectronic components - organic light-emitting diodes (OLEDs) and organic photodetectors (OPDs) - for optical read-out units in flexible, pliable, stretchable and miniaturized sensor systems are researched. Based on our own extensive preliminary work on miniaturized sensor systems and organic optoelectronics, the glovebox-integrated evaporation system applied for here is to be used to research OLED-OPD-based optical measurement systems for flexibly bendable, stretchable and soft substrates.So far only a simple coating system from 2009 is available at the Chair. This only offers a shutter in front of the substrate, no shutters above the sources and no automated recipe-controlled operation and mask change. This means that no parameter variations are possible without removing the samples from the system. The acquisition of a new high vacuum evaporation system is therefore urgently required for the success of the research. Liquid phase process steps as well as the final characterization and encapsulation should take place in a glovebox in a nitrogen atmosphere. For this, the glovebox must be integrated with the evaporation system.