Glovebox-integrated evaporation system

手套箱集成蒸发系统

• 批准号: 463348894
• 金额: --
• 依托单位: Christian-Albrechts-Universität zu Kiel
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2021
• 资助国家: 德国
• 起止时间: 2020-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/463348894?language=en
• 关键词: Glovebox; integrated; evaporation; system

Soft sensor systems that can be worn on the skin offer completely new possibilities for continuous and convenient health monitoring. For example, a sensor “patch” with radio link for recording an electrocardiogram (EKG) has been demonstrated in the literature. In a further step, soft sensor implants - possibly also with an active drug release - can be realized, which also offer completely new shape and functional possibilities in the body. Optical measurement methods are nowadays used in a variety of ways both in imaging and in biomedical molecular diagnostic systems. In order to be able to integrate measurement methods such as absorption measurement technology or fluorescence measurement technology into new types of soft sensor systems, new material classes in addition to inorganic semiconductor materials and new processes for monolithic integration on soft substrates are necessary. Optoelectronic components based on organic semiconductor materials can be processed on a large number of substrates and the optical properties can be tailored using the principles of organic chemistry. Organic light-emitting diodes (OLEDs) and organic photodetectors (OPDs) are therefore very promising for new types of soft, bendable and stretchable sensor systems.At the Chair for Integrated Systems and Photonics Kiel University, organic optoelectronic components - organic light-emitting diodes (OLEDs) and organic photodetectors (OPDs) - for optical read-out units in flexible, pliable, stretchable and miniaturized sensor systems are researched. Based on our own extensive preliminary work on miniaturized sensor systems and organic optoelectronics, the glovebox-integrated evaporation system applied for here is to be used to research OLED-OPD-based optical measurement systems for flexibly bendable, stretchable and soft substrates.So far only a simple coating system from 2009 is available at the Chair. This only offers a shutter in front of the substrate, no shutters above the sources and no automated recipe-controlled operation and mask change. This means that no parameter variations are possible without removing the samples from the system. The acquisition of a new high vacuum evaporation system is therefore urgently required for the success of the research. Liquid phase process steps as well as the final characterization and encapsulation should take place in a glovebox in a nitrogen atmosphere. For this, the glovebox must be integrated with the evaporation system.

可穿戴在皮肤上的软传感器系统为连续和方便的健康监测提供了全新的可能性。例如，文献中已经展示了具有用于记录心电图（EKG）的无线电链路的传感器“贴片”。在进一步的步骤中，可以实现软传感器植入物-也可能具有活性药物释放-这也提供了全新的形状和功能可能性。光学测量方法现在以各种方式用于成像和生物医学分子诊断系统。为了能够将吸收测量技术或荧光测量技术等测量方法集成到新型软传感器系统中，除了无机半导体材料之外，还需要新的材料类别和用于在软衬底上单片集成的新工艺。基于有机半导体材料的光电元件可以在大量的基板上加工，并且可以使用有机化学原理定制光学特性。因此，有机发光二极管（OLED）和有机光电探测器（OPD）在新型柔软、可弯曲和可拉伸传感器系统中非常有前途。基尔大学集成系统与光子学系主任研究了有机光电元件--有机发光二极管（OLED）和有机光电探测器（OPD）--用于柔性、柔韧、可拉伸和小型化传感器系统中的光学读出单元。基于我们在小型化传感器系统和有机光电子学方面的大量前期工作，这里申请的手套箱集成蒸发系统将用于研究基于OLED-OPD的光学测量系统，用于柔性可弯曲，可拉伸和柔软的衬底。这仅在衬底前面提供快门，在源上方没有快门，并且没有自动配方控制操作和掩模改变。这意味着在不从系统中移除样本的情况下，不可能发生参数变化。因此，迫切需要获得新的高真空蒸发系统，以确保研究的成功。液相工艺步骤以及最终表征和封装应在氮气气氛下的手套箱中进行。为此，手套箱必须与蒸发系统集成。