Development of etching process of DLC films in PET bottles
Development of etching process of DLC films in PET bottles
批准号:
15560710
负责人:
HIRAKURI Kenji
金额:
$0.58万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (C)
财政年份:
2003
资助国家:
日本
项目状态:
已结题
起止时间:
2003 至 2004
中文摘要
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英文摘要
Recently, the diamond-like carbon (DLC) films are deposited in the wall of the polyethylene terephthalate (PET) bottles because of the protection for carbon dioxide gas penetration and deterioration against ultraviolet irradiation. However the DLC films fall into the contamination through the recycling process of PET bottle. In order to recycle the PET bottles deposited in DLC films, it is quite necessary to remove the DLC films at the early stage of recycling process. The DLC films were chemically etched by the glow discharge plasma of oxygen gas because carbon films were greatly reacted by the oxygen radicals and ions in the plasma. The etching of the DLC films deposited on the PET materials has been investigated using Raman spectroscopy. The complete removal of the DLC films was confirmed by Raman spectra. The etching depth increases with the etching time and the etching rate at optimum condition is approximately 50 nm/min. Atomic force microscopy observation was relieved surface condition of the PET after the etching treatment at different etching time. The surface roughness of the PET completely removed DLC films is almost same as the pure PET substrate without the exposure of oxygen plasma.
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Y.Ohgoe, K.Hirakuri, O.Miyashita: "Uniform deposition of diamond-like carbon films on polymeric materials for biomedical applications"Surface and Coatings Technology. (未定). (2004)
Y.Ohgoe、K.Hirakuri、O.Miyashita:“在生物医学应用中在聚合物材料上均匀沉积类金刚石碳膜”表面和涂层技术 (TBD)。
DOI:
--
发表时间:
期刊:
影响因子:
--
作者:
[]
通讯作者:
DOI:
10.1016/j.surfcoat.2003.10.009
发表时间:
2004-06
期刊:
Surface & Coatings Technology
影响因子:
5.4
作者:
[Y. Ohgoe;K. Hirakuri;K. Tsuchimoto;G. Friedbacher;O. Miyashita]
通讯作者:
Y. Ohgoe;K. Hirakuri;K. Tsuchimoto;G. Friedbacher;O. Miyashita
Etching behavior of diamond-like carbon films deposited on to polyethylene terephtalate
沉积在聚对苯二甲酸乙二醇酯上的类金刚石碳膜的蚀刻行为
DOI:
--
发表时间:
期刊:
Diamond and Related Materials (掲載決定)(未定)
影响因子:
--
作者:
[K.K.Hirakuri, K.Kuwashima, K.Sato]
通讯作者:
K.Sato
DOI:
10.1016/s0925-9635(02)00379-5
发表时间:
2003-03-01
期刊:
DIAMOND AND RELATED MATERIALS
影响因子:
4.1
作者:
[Hirakuri, KK, Yoshimura, M, Friedbacher, G]
通讯作者:
Friedbacher, G
K.Hirakuri, M.Yoshimura, G.Friedbacher: "Application of DLC films as masks for integrated circuit fabrication"Diamond and Related Materials. 12. 1013-1017 (2003)
K.Hirakuri、M.Yoshimura、G.Friedbacher:“DLC 薄膜作为集成电路制造掩模的应用”金刚石和相关材料。
DOI:
--
发表时间:
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影响因子:
--
作者:
[]
通讯作者:
共 7 条
Evaluation of the enhancement of osteogenesis by Zn-releasing diamond-like carbon film
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批准号:15K06470
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项目类别:Grant-in-Aid for Scientific Research (C)
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资助金额:$3.0万
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财政年份:2015
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负责人:HIRAKURI Kenji
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依托单位:
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项目类别:Grant-in-Aid for Scientific Research (C)
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财政年份:2005
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负责人:HIRAKURI Kenji
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依托单位:
海外基金