Development of etching process of DLC films in PET bottles

PET瓶中DLC薄膜蚀刻工艺的开发

• 批准号: 15560710
• 负责人: HIRAKURI Kenji
• 金额: $ 0.58万
• 依托单位: Tokyo Denki University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15560710/
• 关键词: DLC films; polyethylene terephthalate (PET); chemical etching; recycling; Raman spectroscopy; AFM microscopy; 不純物; Raman分光分析

Recently, the diamond-like carbon (DLC) films are deposited in the wall of the polyethylene terephthalate (PET) bottles because of the protection for carbon dioxide gas penetration and deterioration against ultraviolet irradiation. However the DLC films fall into the contamination through the recycling process of PET bottle. In order to recycle the PET bottles deposited in DLC films, it is quite necessary to remove the DLC films at the early stage of recycling process. The DLC films were chemically etched by the glow discharge plasma of oxygen gas because carbon films were greatly reacted by the oxygen radicals and ions in the plasma. The etching of the DLC films deposited on the PET materials has been investigated using Raman spectroscopy. The complete removal of the DLC films was confirmed by Raman spectra. The etching depth increases with the etching time and the etching rate at optimum condition is approximately 50 nm/min. Atomic force microscopy observation was relieved surface condition of the PET after the etching treatment at different etching time. The surface roughness of the PET completely removed DLC films is almost same as the pure PET substrate without the exposure of oxygen plasma.

近年来，类金刚石（DLC）薄膜被广泛应用于聚对苯二甲酸乙二醇酯（PET）瓶壁，因为它可以防止二氧化碳气体的渗透和紫外线的照射。然而，DLC薄膜在PET瓶的回收过程中会受到污染。为了回收沉积在DLC膜中的PET瓶，在回收过程的前期去除DLC膜是非常必要的。由于碳膜与等离子体中的氧自由基和离子发生了强烈的反应，因此采用氧气辉光放电等离子体对DLC膜进行了化学蚀刻。利用拉曼光谱研究了沉积在PET材料上的DLC薄膜的蚀刻过程。拉曼光谱证实了DLC膜的完全去除。刻蚀深度随刻蚀时间的增加而增加，最佳条件下刻蚀速率约为50 nm/min。原子力显微镜观察了不同刻蚀时间PET刻蚀处理后的表面状况。完全去除DLC膜的PET表面粗糙度与未暴露氧等离子体的纯PET基板几乎相同。

项目成果

Y.Ohgoe, K.Hirakuri, O.Miyashita: "Uniform deposition of diamond-like carbon films on polymeric materials for biomedical applications"Surface and Coatings Technology. (未定). (2004)

Y.Ohgoe、K.Hirakuri、O.Miyashita：“在生物医学应用中在聚合物材料上均匀沉积类金刚石碳膜”表面和涂层技术 (TBD)。

Uniform deposition of diamond-like carbon films on polymeric materials for biomedical applications

• DOI: 10.1016/j.surfcoat.2003.10.009
• 发表时间: 2004-06
• 期刊: Surface & Coatings Technology
• 影响因子: 5.4
• 作者: Y. Ohgoe;K. Hirakuri;K. Tsuchimoto;G. Friedbacher;O. Miyashita

Etching behavior of diamond-like carbon films deposited on to polyethylene terephtalate

沉积在聚对苯二甲酸乙二醇酯上的类金刚石碳膜的蚀刻行为

• 期刊: Diamond and Related Materials (掲載決定)(未定)
• 作者: K.K.Hirakuri;K.Kuwashima;K.Sato
• 通讯作者: K.Sato

Application of DLC films as masks for integrated circuit fabrication

• DOI: 10.1016/s0925-9635(02)00379-5
• 发表时间: 2003-03-01
• 期刊: DIAMOND AND RELATED MATERIALS
• 影响因子: 4.1
• 作者: Hirakuri, KK;Yoshimura, M;Friedbacher, G
• 通讯作者: Friedbacher, G

K.Hirakuri, M.Yoshimura, G.Friedbacher: "Application of DLC films as masks for integrated circuit fabrication"Diamond and Related Materials. 12. 1013-1017 (2003)

K.Hirakuri、M.Yoshimura、G.Friedbacher：“DLC 薄膜作为集成电路制造掩模的应用”金刚石和相关材料。